Axcelis Scores Another High Current Implant Win with Samsung Order; GSD Ultra's unrivaled productivity proves to be decisive factor in head-to-head evaluations.

Business Editors/High-Tech Writers

BEVERLY, Mass.--(BUSINESS WIRE)--Dec. 3, 2002

Marking another major win for its multi-wafer, ultra low energy, high current ion implant platform, Axcelis Technologies, Inc. (NASDAQ: ACLS), has secured a multi-system order for its GSD Ultra ion implanter from Samsung Electronics Co., Ltd., a leading supplier of advanced memory technology. The sale follows a head-to-head competitive evaluation in which the GSD Ultra's unmatched productivity led Samsung to order the systems for its chip manufacturing operations in Kiheung, Korea.

Samsung's order is the latest in a series of wins for Axcelis' line of high current, low energy implanters, and extends the company's installed base of high current systems in the Asia Pacific region. Mike Luttati, chief operating officer of Axcelis, noted, "The GSD Ultra's powerful low energy beam currents and easy-access maintenance design make it a highly productive high current platform. These innovations presented a sustainable competitive advantage to Samsung and were key factors in its ultimate decision to purchase from Axcelis."

The GSD Ultra combines Axcelis' new Ultra low-energy beamline with the company's field-proven multi-wafer GSD platform to meet the semiconductor industry's need for higher levels of productivity, reliability and process control in the 100nm device generation and beyond. The new beamline shortens implant times to boost throughput and productivity, enabling chipmakers like Samsung to produce ultra shallow junctions and other advanced transistor structures on a high-volume scale.

"This is a tremendously satisfying win for Axcelis because it further demonstrates the kind of results we're delivering through a commitment to technology and process innovation - both within Axcelis and in our partnerships with global leaders like Samsung," Luttati said. "We're thrilled to have the opportunity to build on this success with Samsung moving forward."

The GSD Ultra systems will complement Axcelis' line of high energy implanters already installed at Samsung. Axcelis' entire Ultra line, available for both 200mm and 300mm applications, has gained rapid acceptance at chipmakers in North America, Europe and Asia since its introduction earlier this year.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-Q filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.