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Axcelis Receives New Design-in Win for Optima HD Implanter from Major Asian Chipmaker.


Thriving Optima technology continues steady penetration into leading-edge fabs

BEVERLY, Mass. -- Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
: ACLS ACLS
abbr.
advanced cardiac life support
) today announced that it has received another order for an Optima HD high dose implanter from a major Asian memory manufacturer. This new design-in win was a direct result of the Optima HD's unique ability to perform emerging implant applications that are not achievable using competitive systems. The tool will ship during the first quarter of 2007.

"Getting another design-in win from one of the world's largest chipmakers speaks volumes about overall customer confidence in our Optima technology," said Mary Puma, chairman and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of Axcelis. "Customers value the flexibility of the Optima HD platform to perform a wide variety of traditional and emerging high dose applications. We've designed our entire suite of Optima implanters to have unmatched extendibility as advanced device manufacturing prepares for the 45nm node and beyond."

The Optima HD platform consists of three tools: the Optima HD for traditional high dose and overlapping mid dose applications; the Optima HD Imax, which uses ClusterBoron([R]) technology for extremely high dose, low energy implants such as dual poly gate and advanced source drain extensions; and the Optima HD Hmax for emerging hydrogen-based implants. All Optima HD systems incorporate Axcelis' patented spot beam A spot beam, in telecommunications parlance, is a satellite signal that is specially concentrated in power (i.e. send by a high-gain antenna) so that it will cover only a limited geographic area on earth.  technology, which provides the greatest extendibility, productivity and process control for advanced devices.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com
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Copyright 2007, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Mar 7, 2007
Words:303
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