Axcelis Partners With Fudan University for Semiconductor Research and Development; Partnership Extends Company's Role in Supporting China's Semiconductor Industry.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--March 25, 2002 Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ), today announced that it has formed a cooperative research and development partnership with Fudan University Fudan University (Simplified Chinese: 复旦大学; Traditional Chinese: 復旦大學; Pinyin: Fùdàn Dàxué in Shanghai, China, strengthening the company's long-standing commitment to the region. The partnership brings together Axcelis' expertise in ion implant and rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. (RTP (1) (Rapid Transport Protocol) The protocol used in IBM's High Performance Routing (HPR) system. (2) (Realtime Transport Protocol) An IP protocol that supports real time transmission of voice and video. ) technologies with China's premier academic microelectronics research and development center. "China is poised to become one of the top regions for semiconductor technology development," said John Poate, chief technology officer of Axcelis. "Fudan's superb pool of talent, ideas and expertise complements Axcelis' semiconductor process leadership and continually expanding role in the country. The result is a powerful partnership that has the potential to achieve synergistic effects at many levels." "Working alongside a world-class company like Axcelis here in Shanghai is a unique opportunity for the students and faculty of Fudan," said Professor Tang Ting-ao, director of the Institute of Microelectronics, Fudan University. "It is this type of collaboration that will help us build a strong semiconductor industry in China, one capable of developing great people, products and processes." The partnership is focused on advanced process and device development. The research and development program will take place at both Fudan University's Microelectronics Center in Shanghai and Axcelis' recently opened $31 million Advanced Technology Center in Beverly, Mass. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com. |
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