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Axcelis Opens $31 Million Semiconductor Technology Development Center in Massachusetts.


Business/Technology Editors

BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 28, 2002

Dedicated to Next-Generation Semiconductor Process Development,

Product Demonstration and Customer Training

Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
: ACLS ACLS
abbr.
advanced cardiac life support
), today announced the opening of its Advanced Technology Center, a new 140,000-square-foot facility dedicated to next-generation semiconductor process development, product demonstration and customer training. Axcelis invested $31 million in the new building, located adjacent to corporate headquarters in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. .

Former U.S. Secretary of Labor and Massachusetts Democratic gubernatorial candidate Robert Reich joined several local dignitaries in the opening of Axcelis' new facility. Reich, a long-time advocate of high-technology education and workforce development programs, delivered the keynote address keynote address
n.
An opening address, as at a political convention, that outlines the issues to be considered. Also called keynote speech.

Noun 1.
. "Axcelis' Advanced Technology Center sets an example for where the Massachusetts economy must continue to go if we are going to be competitive with other states in the decades to come," Reich said.

"As a company that prides itself on innovation and technology leadership, Axcelis will not waver in its commitment to deliver best-in-class technology to the semiconductor manufacturing industry," said Mary Puma, president and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of Axcelis. "Such a commitment has required smart investments in our people, facilities and technology development, even in the face of the worst downturn in this industry's history. In the past year, we increased our overall investment in R&D by 10 percent and remained focused on our capital investment in the Advanced Technology Center, which is critical to supporting customers and meeting the semiconductor industry's most complex manufacturing challenges."

The Advanced Technology Center will give customers access to Axcelis' equipment and process applications expertise, supporting them with core transistor formation technology as well as the advanced cleaning and curing techniques used in semiconductor production.

With Axcelis' entire line of ion implantation Ion implantation

A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material.
, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , curing and cleaning systems housed at the Advanced Technology Center, Axcelis can offer a full range of product demonstrations while developing next-generation process applications. The facility includes a state-of-the-art applications laboratory, where technical alliances and process integration programs can be carried out. In addition, a new training center will offer courses focused on optimizing system performance and productivity using a combination of traditional, electronic and Web-based customer training methods.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland Rockville is the county seat of Montgomery County, Maryland, United States. According to the 2006 census update, the city had a total population of 59,114, making it the second largest city in Maryland.  as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.
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Publication:Business Wire
Geographic Code:1USA
Date:Feb 28, 2002
Words:434
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