Axcelis Marks Another Low Energy Implant Advance with Cluster Boron Beams; New SemEquip source offers 18X boost in low energy productivity.BEVERLY, Mass. -- In a move to deliver a step-change improvement in low-energy beam currents, Axcelis Technologies, Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ) today announced that it will integrate cluster boron boron (bōr`ŏn) [New Gr. from borax], chemical element; symbol B; at. no. 5; at. wt. 10.81; m.p. about 2,300°C;; sublimation point about 2,550°C;; sp. gr. 2.3 at 25°C;; valence +3. source technology on select implant platforms. The technology is seen as the most promising method of extending the viability of low energy implants, especially for the production of advanced ultra shallow junction (USJ USJ Universitê Saint-Joseph (Beirut, Lebanon) USJ Universal Studios Japan USJ Ultra Shallow Junction (semiconductor measurement) USJ Universiti Subang Jaya ) and dual poly gate (DPG DPG diphosphoglycerate. ) transistor structures. Cluster boron molecules contain 18 boron atoms and deliver the equivalent of an 18-fold increase in beam current at ultra low energy. "Axcelis is adopting cluster boron technology because it delivers superior throughput at low energy compared with tradition source technology, further extending Axcelis' unparalleled strength in critical low energy implant applications," said Mark Namaroff, Axcelis' senior vice president of marketing. "The technology also rivals the productivity of alternative plasma immersion techniques without introducing the process issues typically associated with non-mass analyzed plasma immersion, such as energy and species contamination, poor angle control and lack of tilt capability." Axcelis has been exploring molecular source technology as a potential candidate for extending low energy implant technology since the late 1990s. The company is using ClusterIon(TM) source technology from SemEquip, a manufacturer of ion sources and ion delivery systems for the OEM (Original Equipment Manufacturer) The rebranding of equipment and selling it. The term initially referred to the company that made the products (the "original" manufacturer), but eventually became widely used to refer to the organization that buys the products and implanter market. "We are very excited that the market leader in ion implant has agreed to implement our source technology," added Brian Cohen cohen or kohen (Hebrew: “priest”) Jewish priest descended from Zadok (a descendant of Aaron), priest at the First Temple of Jerusalem. The biblical priesthood was hereditary and male. , chief executive officer for SemEquip. "ClusterIon technology is the perfect complement to Axcelis' low energy implant superiority, and we are eager to collaborate with them in delivering the technology on volume production tools." About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com. Forward-Looking Statements This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission. |
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