Axcelis Marks 300th High Energy Platform Installation With HE3 Sale to Samsung.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 14, 2001 Milestone shipment reflects industry preference for Axcelis' Patented RF Linear Accelerator linear accelerator: see particle accelerator. linear accelerator or linac Type of particle accelerator that imparts a series of relatively small increases in energy to subatomic particles as they pass through a sequence of ion implant technology Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ), today marked the shipment of its 300th HE ion implant product with the sale of an HE3 300mm implanter to Samsung Electronics Samsung Electronics (SEC, Hangul:삼성전자; KSE: 005930, KSE: 005935, LSE: SMSN, LSE: SMSD) is a South Korean multinational corporation and the world's largest and leading electronics and information technology company. Co. Ltd., one of the world's leading suppliers of DRAM. The milestone shipment demonstrates Axcelis' global position for high energy ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. technology. The HE3 has been installed on Samsung's SDRAM (Synchronous DRAM) A type of dynamic RAM (DRAM) memory chip that has been widely used since the late 1990s. SDRAM chips eliminated wait states by dividing the chip into two cell blocks and interleaving data between them. manufacturing line in Kiheung, Republic of Korea, where it will be used for advanced 300mm well and channel implants. This sale builds on Axcelis' long term relationship with Samsung, which has an installed base of Axcelis 200mm GSD/HE implanters. "Axcelis has played a leading role in developing the high energy ion implant technology over the past decade. This milestone is a testament to the exceptional system design and applications expertise that has gone into developing our cost-efficient, industry-proven HE platform and linear accelerator technology," said Mike Luttati, senior vice president and general manager of the ion implantation and thermal processing group of Axcelis. "With the HE3, Samsung is able to cover a broad range of implant applications with the high productivity that has become a hallmark of our HE systems. This HE3 sale is also significant because it marks the continuation of our relationship with Samsung as it moves into advanced 300mm manufacturing." David Duff, director of marketing, ion implantation and thermal processing, for Axcelis, said, "Axcelis' history of providing highly reliable, productive, and cost-effective HE implanters was a key factor in Samsung's selection of the HE3. This exceptional performance record gives us confidence that the HE3 will be an asset as Samsung launches 300mm operations in Korea." Axcelis HE products deliver extraordinary process control across the broadest range of advanced applications - from retrograde wells, triple wells and other high-energy implants, to lower-energy channel-stop and Vt-adjust implants. In addition, the systems' multi-wafer endstation and patented, rapid-tuning RF Linear Accelerator technologies permit processing of these well and channel steps in ultra-efficient implant chains - maximizing productivity and minimizing cost of ownership. The HE3 continues Axcelis' history or providing unsurpassed productivity and lowest cost of ownership benefits by providing the broadest applications space coverage of any single ion implant system on the market. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com. |
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