Axcelis Launches RapidStrip Dry Strip Product.Business Editors BEVERLY, Mass.--(BUSINESS WIRE)--Dec. 2, 2003 New 300mm platform delivers speed, efficiency for high-volume resist strip applications In a move that makes one of the most efficient and cost-effective photoresist strip systems available to chipmakers worldwide, Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ) has introduced the new RapidStrip(TM) 320 resist and polymer removal system. The latest addition to Axcelis' complete family of dry strip products, RapidStrip has been specifically designed to reduce cost-of-ownership and improve productivity for high-volume, 300mm front-end-of-line (FEOL FEOL Front End Of Line (semiconductor manufacturing) ) process applications. "With the RapidStrip 320, customers can achieve high throughput and reliability with a very simple and efficient tool," said Dr. Jan-Paul van Maaren, vice president and general manager of Axcelis Curing and Cleaning Systems. "The RapidStrip platform provides high productivity and process flexibility in a very small package that doesn't waste valuable cleanroom space. This product offering enables us to gain additional market share, moving us one step closer to our goal of being the number two dry strip supplier by 2005." The RapidStrip product rounds out the company's full line of dry strip products for front-end-of line (FEOL) and back-end-of-line (BEOL BEOL Back-End-Of-Line BEOL Bent's Old Fort National Historic Site (La Junta, Colorado) BEOL Bent's Old Fort National Historic Site (US National Park Service) ) process applications. Available in 200mm and 300mm versions, the RapidStrip products are based on a simple, compact design that provides exceptionally low cost of ownership with levels of productivity and reliability that are essential for low-cost semiconductor manufacturing. The RapidStrip systems use downstream microwave plasma Microwaves, being high frequency electromagnetic radiation in the GHz range, are capable of exciting electrode-less gas discharges. Microwave-excited plasmas have two appealing properties: If applied in surface-wave-sustained mode, they are especially well suited to generate generation and chuck-based wafer heating to provide an effective dry strip process. Small process vacuum chambers enable high ash rates and excellent process repeatability. The smart design also boasts the industry's smallest footprint coupled with easy service access. The RapidStrip platform is available in single and dual process-chamber configurations, giving customers the flexibility to add incremental capacity. RapidStrip is the first new product to result from Axcelis' acquisition of Matrix Integrated Systems earlier this year. As with Axcelis' entire dry strip family of tools, RapidStrip is backed by the company's award-winning customer service and support, as well as the technical expertise of Axcelis' team of scientists and engineers, who continue to explore innovative technologies for stripping and cleaning advanced semiconductor materials Semiconductor materials are insulators at absolute zero temperature that conduct electricity in a limited way at room temperature (see also Semiconductor). The defining property of a semiconductor material is that it can be doped with impurities that alter its electronic properties and device structures. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. , rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com. Forward-Looking Statements This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission. |
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