Axcelis Launches RapidCure CE Advanced Charge Erase Technology.Industry's fastest charge erase system for 300mm boosts manufacturing sort yield, enabling makers of advanced discrete and embedded flash meet growing market demand BEVERLY, Mass. -- Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc., (Nasdaq: ACLS ACLS abbr. advanced cardiac life support ) today introduced RapidCure CE for 300mm device manufacturing. The fastest UV charge erase technology on the market, the RapidCure CE not only cuts erase times up to a factor of 10X but delivers a more complete erase compared to conventional erase technologies. This enables makers of flash and other non-volatile memory Refers to memory chips that hold their content without power being applied. It may refer to chips that are not changeable, such as ROMs and PROMs, or to chips that can be rewritten many times such as flash memory. chips to significantly boost yield and reduce operating costs. The first 300mm RapidCure CE shipped as part of a multiple tool order to a leading flash manufacturer in November. Electrical charge build-up occurs during normal semiconductor fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. with the use of plasma-assisted, ion-assisted and thermal annealing annealing (ənēl`ĭng), process in which glass, metals, and other materials are treated to render them less brittle and more workable. processes, but it can damage device structures and reduce wafer yields if left unchecked. And, on flash devices, accumulated charge in the floating gate must be neutralized prior to final test to help establish sort yields. In all cases, it's become progressively harder to quickly and effectively erase stored charge as device geometries have continued to shrink, film stacks increase in complexity and novel materials are introduced into the device structure. To address this challenge, Axcelis designed the RapidCure CE with proprietary, high-intensity UV light sources configured with uniquely tuned spectra and precision optics, process-specific chamber controls and programmable wafer heating. This combination allows for rapid and complete neutralization neutralization, chemical reaction, according to the Arrhenius theory of acids and bases, in which a water solution of acid is mixed with a water solution of base to form a salt and water; this reaction is complete only if the resulting solution has neither acidic nor of charge build-up in an automated, single-step process that does not induce device damage. The RapidCure CE technology offers the industry's most flexible chare erasure ERASURE, contracts, evidence. The obliteration of a writing; it will render it void or not under the same circumstances as an interlineation. (q.v.) Vide 5 Pet. S. C. R. 560; 11 Co. 88; 4 Cruise, Dig. 368; 13 Vin. Ab. 41; Fitzg. 207; 5 Bing. R. 183; 3 C. & P. 65; 2 Wend. R. 555; 11 Conn. solution for both front- and back-end-of-line device manufacturing environments. "As the demand in the flash market intensifies, customers must continue to maximize fab productivity and yield," said Mary Puma, chairman and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. of Axcelis. "We're pleased to offer the industry's first 300mm advanced charge erasure solution, providing our customers with a highly productive, cost effective solution for next generation device manufacturing." Axcelis is the recognized leader in the semiconductor industry for UV curing technologies. The company's proprietary UV lamp design and in-house bulb manufacturing capabilities enable Axcelis to tailor processes to each customer's application need. Axcelis offers three configurations of the RapidCure system, including the RapidCure CE, RapidCure FC and RapidCure PS, to give customers the flexibility to cover a broad range of charge erase, film curing and photostabilization applications. Axcelis representatives will be available to discuss RapidCure CE and other UV-based curing products and applications during SEMICON SEMICON Semiconductors Equipment and Material International Conference Japan on December 6-8. Interested parties are invited to stop by the Axcelis booth, #3A-301, at the Makuhari Messe in Chiba, Japan. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Saijo, Japan through its joint venture, SEN Corporation, an SHI and Axcelis Company. The company's Internet address is: www.axcelis.com. Forward Looking Statements This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Unanticipated product performance issues could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission. |
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