Axcelis Introduces Optima XE Single Wafer High Energy Ion Implanter.Strengthens high energy leadership position with new tool, completing the Optima single wafer product family BEVERLY, Mass. -- Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ) today introduced the new Optima XE high energy ion implanter, the final component of Axcelis' Optima single wafer suite of tools. The Optima XE, which is available for shipment, provides a complete range of energy levels from 10keV to 4MeV. Its inherent flexibility and broad energy range allow a single tool to support chipmakers' dynamic high energy requirements for DRAM, NAND (Not AND) A Boolean logic operation that is true if any single input is false. Two-input NAND gates are often used as the sole logic element on gate array chips, because all Boolean operations can be created from NAND gates. See flash memory. and NOR FLASH, embedded memory and logic device manufacturing. "Axcelis has long been the principal supplier of high energy implant equipment with over 550 tools in production worldwide and at least 80% market share since 1996. The Optima XE positions us to extend our leading high energy position," said Mary Puma, chairman and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. of Axcelis. "Furthermore, this marks the completion of our Optima tool suite, allowing us to meet the industry's full range of implant needs with equipment that provides excellent performance and productivity." The Optima XE combines Axcelis' production-proven RF Linac high energy, spot beam A spot beam, in telecommunications parlance, is a satellite signal that is specially concentrated in power (i.e. send by a high-gain antenna) so that it will cover only a limited geographic area on earth. technology with a high-speed, state-of-the-art single wafer endstation, enabling unmatched throughput. Axcelis' advanced spot beam ensures that all points across the wafer see the same beam at the same angle, resulting in exceptional process control and maximum yield. Axcelis is also introducing the Optima HE, a reduced energy version of the implanter. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com. |
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