Axcelis Introduces Faster FusionGemini Dry Strip Systems; FusionGemini ES and FusionGemini Plasma Asher Increase Throughput Capability for Volume Manufacturing Needs.Business Editors/High-Tech Writers BEVERLY, Mass.--(BUSINESS WIRE)--March 11, 2003 Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ), has developed significant enhancements for its FusionGemini ES and FusionGemini Plasma Asher dry strip systems. The latest innovations to evolve from Axcelis' continuous improvement programs, these enhancements give chipmakers a highly flexible dry strip process with a 40 percent improvement in throughput for high volume manufacturing operations Manufacturing operations concern the operation of a facility, as opposed to maintenance, supply and distribution, health, and safety, emergency response, human resources, security, information technology and other infrastructural support organizations. . With more than 600 systems installed worldwide, Axcelis' FusionGemini platform is recognized for its wide process window to handle a variety of dry strip and polymer removal applications. The enhanced FusionGemini ES and FusionGemini Plasma Asher systems offer improved process performance and increased throughput of up to 180 wafers per hour for front-end-of-line (FEOL FEOL Front End Of Line (semiconductor manufacturing) ) and back-end-of-line (BEOL BEOL Back-End-Of-Line BEOL Bent's Old Fort National Historic Site (La Junta, Colorado) BEOL Bent's Old Fort National Historic Site (US National Park Service) ) cleaning applications. The downstream microwave design provides efficient photoresist and polymer removal, while avoiding plasma charge damage. The new features are also available as an upgrade to existing FusionGemini ES and FusionGemini Plasma Asher systems. "These latest enhancements to the FusionGemini platform reinforce our commitment to process and throughput improvements for our customer base," said Jan-Paul van Maaren, vice president and general manager of Axcelis Curing and Cleaning Systems. "Axcelis continues to explore new ways to make the cleaning process more efficient and cost effective. These enhancements combine the flexibility of the FusionGemini ashers with very high throughput and process performance." Axcelis' continuous improvement process has led to numerous other Cleaning Systems enhancements, including the recent H20 vapor-assisted process for the company's FusionGemini ES systems. Use of the H2O vapor enhancement optimizes the dry polymer removal process for FEOL and BEOL applications, enabling subsequent wet processing steps to be carried out in a significantly shorter time with less wet chemical consumption. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. , rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com. Forward-Looking Statements This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission. |
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