Axcelis Installs 300mm Asher At Lithography Process Demo Lab; FusionES3 Will be Used in Litho Vendor's 300mm Process Development Program.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--Aug. 27, 2001 Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc., (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ), today announced that an industry-leading lithography equipment supplier has purchased a FusionES3 dry photoresist removal system for its 300mm process characterization lab. The FusionES3, installed at the customer's site in May, will be used in 300mm lithography process development, wafer reclaim and customer demonstrations. "Axcelis' FusionES3 offers our customer the flexibility it needs in order to carry out the widest range of resist and polymer removal tasks at its 300mm process characterization lab," said Michael Dreyer, vice president and general manager of Axcelis' Photoresist Processing Division. "With production-proven reliability, the FusionES3 has repeatedly demonstrated itself as the dry strip tool of choice at 300mm facilities. The system was one of the earliest 300mm dry strip tools to enter the market, and has earned a reputation as one of the most reliable and mature dry strip tools available. With well over three million production wafers processed on the FusionES3 platform, Axcelis has seen wide market acceptance in the 300mm dry strip arena." Developed for advanced technology nodes, the FusionES3 combines flexible process architecture with comprehensive, damage-free dry resist and residue removal. The FusionES3's dual process chambers use a non-contact, radiant-heating system that provides excellent temperature uniformity while enabling multi-temperature steps within a single process recipe. The system also features enhanced residue removal capabilities to reduce or eliminate the need for potentially hazardous and expensive wet cleaning  This article or section needs copy editing for grammar, style, cohesion, tone and/or spelling.You can assist by [ editing it] now. processes. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. equipment; rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. systems; and photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture Sumitomo Eaton Nova. The Company's Internet address is http://www.axcelis.com. |
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