Axcelis Cleaning Platform Selected by Major Japanese Chipmaker; Order Based on Strength of Axcelis' Support, Reliability of RadiantStrip 320i Tool.BEVERLY, Mass. -- Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ) has won an order for multiple RadiantStrip 320i photoresist dry strip systems from a major semiconductor manufacturer based in Tokyo, Japan. The order reflects the strength of Axcelis' presence in Japan, building on the company's market leadership position in ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. in the region. The customer selected the RadiantStrip 320i systems based, in part, on the extensive customer support Axcelis provides. "In Japan, Axcelis is known for its ability to identify and understand the specific needs of IC manufacturers in this market," said Tadashi Toyoda, Axcelis' managing director for Japan. "These insights have enabled Axcelis to build a strong relationship with Japanese chipmakers through the years, and we're now building on that success with our cleaning platform." The RadiantStrip 320i was also selected based on its historical record of reliability. Axcelis designed the machine for dependability and productivity in the most advanced dry strip applications. The platform employs a dry removal process using application-tailored process gases, which form a plasma generated by microwave energy. Its unique radiant heating radiant heating: see heating. radiant heating Heating system in which heat is transmitted by radiation from a heated surface. Radiant heating systems usually employ either electric-resistance wiring or hot-water heating pipes, which may embedded in approach enables multi-temperature stripping, for faster processing without resist 'popping' that can occur with implanted photoresist. This platform also includes the RadiantStrip 320Lk, a revolutionary zero-damage strip and clean tool designed specifically for the integration of low-k materials into advanced back-end-of-line (BEOL BEOL Back-End-Of-Line BEOL Bent's Old Fort National Historic Site (La Junta, Colorado) BEOL Bent's Old Fort National Historic Site (US National Park Service) ) processes. Axcelis will ship the RadiantStrip 320i tools during the current quarter to the customer's fab in Japan, where they will be used for advanced logic manufacturing. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com. Forward-Looking Statements This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission. |
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