Axcelis CEO Mary Puma Elected Chairman of the Board; Stephen Hardis Becomes Lead Director.

BEVERLY, Mass. -- Axcelis Technologies, Inc. (NASDAQ: ACLS) today announced that the company's board of directors has elected President and Chief Executive Officer Mary Puma, 47, to the position of chairman of the board. Puma, whose new title is chairman and chief executive officer, succeeds Stephen Hardis, who has been named Axcelis' lead director.

"Mary has demonstrated extraordinary leadership ability since becoming chief executive officer of Axcelis in 2002," said Hardis. "Her success in improving Axcelis' operational efficiency while driving continued innovation in its technology has positioned the company well for future success. We look forward to her continued contributions as chairman."

"I am honored to accept the role of chairman of Axcelis' board of directors," said Puma. "I am confident that Axcelis is very well positioned for the future. We are focusing on a three-point growth strategy, which includes maintaining our leadership position in the ion implant market through the success of our next-generation Optima tools; increasing our scale through growth in our non-implant businesses, like dry strip; and continuing to drive efficiency throughout the business to ensure profitability and positive cash flow."

Puma played an instrumental role in Axcelis' spin out from Eaton Corporation in 2000, when she was named the company's president and chief operating officer. She joined Eaton in 1996 as the general manager of its commercial controls division. In 1998, she became vice president of Eaton's implant business. She was promoted to vice president of the semiconductor operation in 1999. Prior to joining Eaton, Puma spent 15 years in various marketing and general management positions at five different General Electric business units.

Puma holds a master's degree in management from the MIT Sloan School and a bachelor's degree in economics, Phi Beta Kappa, from Tufts University. She is a member of the boards at Nordson Corporation, Semiconductor Equipment and Materials International (SEMI) and the North Shore United Way.

Safe Harbor Statement

This document contains forward-looking statements under the SEC safe harbor provisions, including but not limited to the ability of the Company to maintain its leadership position in the ion implant market, and that Axcelis will be the only company to have implant products optimized for both established and emerging markets. These statements are based on management's current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including the conversion of orders to revenue in any particular quarter, or at all, our ability to implement successfully our profit plans, the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with and purchases by major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.