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Axcelis Announces Shipment of First Optima HD High Dose Implanter; Groundbreaking single wafer implant platform takes major step toward global adoption.


BEVERLY, Mass. -- Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
: ACLS ACLS
abbr.
advanced cardiac life support
) today announced that it has successfully shipped its first Optima HD high dose ion implanter to a major memory chipmaker chip·mak·er  
n.
A manufacturer of electronic and integrated circuit chips.
 in Asia. The shipment is the latest for Axcelis' new Optima platform of single wafer implanters designed as an innovative, cost-effective approach to existing implantation needs, as well as those at the 65nm technology node and beyond.

"The shipment of our first Optima HD is a true milestone," said Mary Puma, chairman and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of Axcelis. "With its ability to perform conventional high dose implants today, and unmatched extendibility for future device manufacturing trends, including dual poly-gate and hydrogen applications, we expect the Optima HD, as the next generation in high dose technology, to significantly influence the future of ion implantation."

The Optima HD covers all traditional high dose implants while providing significant mid dose applications overlap for maximum versatility and capital efficiency. The Optima HD delivers precise implants using Axcelis' advanced spot beam technology, resulting in exceptional implant uniformity and repeatability. Axcelis' proprietary RadiusScan(TM) endstation further enhances productivity and enables the system to cover an extremely broad dose range.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan, through its joint venture, SEN Corporation, an SHI and Axcelis Company. The company's Internet address is: www.axcelis.com.
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Publication:Business Wire
Geographic Code:1USA
Date:Jun 5, 2006
Words:270
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