Axcelis Announces Shipment of 300mm Implanters to Trecenti Technologies; Hitachi and UMC Joint Venture to Use SEN Implanters in First 300mm Production Facility in Japan.

Business/Technology Editors

BEVERLY, Mass.--(BUSINESS WIRE)--Nov. 1, 2000

Axcelis Technologies, Inc. formerly Eaton Semiconductor Equipment Operations, today announced the shipment of the first 300mm systems to Trecenti Technologies, Inc. The ion implantation systems were shipped from the Axcelis-Sumitomo Heavy Industries Joint Venture, Sumitomo Eaton Nova (SEN) in Toyo, Japan. The implanters are part of a multiple system order that will be completed over the next three months.

Trecenti, a Joint Venture between Hitachi, Ltd. of Japan and UMC of Taiwan, is ramping up the first production 300mm facility in Japan at Hitachi's Naka Works. "We are looking forward to continuing our work with SEN and expect our new systems to exceed our requirements as we make this pioneering effort," says Mr. Atsuyoshi Koike, Board Director and General Manager of Manufacturing Technology Division of Trecenti Technologies, Inc.

"The Axcelis 300mm implant product line combines both serial and multi-wafer processing capability as well as versatile applications coverage across the tool set. These features provide compelling economic benefits and the superior performance needed to develop their most advanced devices," said Mike Luttati, sr. vice president and general manager of Axcelis' ion implant & thermal processing systems group. "Both of the new 300mm tools were originally developed as joint projects between SEN and Axcelis and are only a sample of the joint programs we have in place. We are pleased and excited by this demonstration of our successful partnership in Japan and of our ability to bring important new products to market."

"SEN has conducted lengthy evaluations of 300mm implant tools utilizing high and medium current as well as high energy implanters with our customer base," said Dr. Noriyuki Takahashi, President of SEN. "We are proud to be bringing these highly mature 300mm tools into production with the two partners at Trecenti, Hitachi and UMC."

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment, rapid thermal processing systems, photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture Sumitomo Eaton Nova. The company's Internet address is: www.axcelis.com.