Axcelis Announces Dry Strip System Sale to Major North American Semiconductor Chip Manufacturer; FusionES3 Dry Strip Systems to be used in DRAM Production.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--Oct. 2, 2000 Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (Nasdaq: ACLS ACLS abbr. advanced cardiac life support ), formerly Eaton Semiconductor Equipment Operations, today announced the sale of multiple FusionES3 300 mm photoresist dry strip systems to a major North American North American named after North America. North American blastomycosis see North American blastomycosis. North American cattle tick see boophilusannulatus. semiconductor manufacturer. The FusionES3 systems will be delivered in 200 mm `bridge tool' configurations and used for 200 mm DRAM production at a U.S. fab. The FusionES3 bridge tools are configured to process 200 mm wafers and can easily be configured to run 300 mm wafers. "This customer chose the tool for its maturity, reliability and productivity advantages. They expect to achieve much higher productivity by using the FusionES3 than with other 200 mm dry strip tools due to the system's throughput and performance advantages," said Michael Dreyer, vice president and general manager for Axcelis' photoresist processing group. This FusionES3 sale follows a similar sale to a global electronics company, which purchased the tool earlier this year for photoresist and residue removal in the manufacturing of semiconductor devices on 300 mm wafers. Those sales are indicative of the recent strides Axcelis has made in this market sector. "According to according to prep. 1. As stated or indicated by; on the authority of: according to historians. 2. In keeping with: according to instructions. 3. the industry analysts at Dataquest, our dry strip revenue has increased by nearly 115 percent," Dreyer said. "From 1998 to 1999, our market share increased by 5 percent to nearly 15 percent of a very competitive market." The FusionES3, developed for advanced technology nodes, provides comprehensive, damage-free dry resist and residue removal in the same chamber. The system features a high strip rate for excellent throughput and productivity. It also includes a zone-controlled radiant heating radiant heating: see heating. radiant heating Heating system in which heat is transmitted by radiation from a heated surface. Radiant heating systems usually employ either electric-resistance wiring or hot-water heating pipes, which may embedded in system, which enables highly uniform, multi-temperature processing. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. equipment; fast ramp vertical furnaces and rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. systems; and photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture Sumitomo Eaton Nova. The company's Internet address is: www.axcelis.com. |
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