Axcelis' Newest Ion Implanter Delivers Broadest Range of Capabilities for Advanced Transistor Formation.

Business Editors/High-Tech Writers

SEMICON West 2003

Booth #702

BEVERLY, Mass.--(BUSINESS WIRE)--July 11, 2003

New Paradigm(TM) system offers unmatched productivity for well and

channel implants

Axcelis Technologies, Inc. (NASDAQ: ACLS) has developed a new multi-wafer ion implantation system designed to support the industry's complete array of well and channel formation needs. The new ion implanter, the Axcelis Paradigm(TM), gives chipmakers the ability to use a single, high-productivity platform for an expanded range of transistor-building applications in the 90nm technology node and beyond, thus minimizing the need for redundant tools in the fab.

"The introduction of the Paradigm marks an important shift in the ion implant market. Semiconductor manufacturers no longer have to use separate high-energy and medium-current implanters to cover their well and channel formation needs," said Mike Luttati, chief operating officer of Axcelis.

"Well and channel implants are fundamental to the production of modern transistors, and represent approximately 50% of all implant applications today," said John Poate, Axcelis' chief technology officer. "Axcelis' research collaborations with customers have revealed that these implants often can be done most efficiently by chaining several implant recipes together on a multi-wafer platform like the Paradigm. The multi-wafer system allows users to combine, or "chain," multiple implant recipes together in a single process run, eliminating unnecessary loading and unloading of wafers - and the transfer of wafers from tool to tool."

Poate added, "When you combine this capability with the Paradigm's extensive low-tilt implant applications coverage, the result is an implant tool that is ideally suited to achieve 300mm fab productivity goals - without sacrificing process reliability or control."

Delivering beam currents at energies ranging from 10keV to 1.9MeV, the Paradigm supports an array of well and channel applications - including high-energy implants and those applications conventionally addressed by medium-current implanters - by offering exceptional angle control for normal-incidence implants and significantly improving low-energy beam currents. The resulting expanded applications base means customers can use fewer implanters to build advanced transistors, lowering overall operating and capital costs.

The Paradigm builds on the strength of Axcelis' high-energy implant platform, which has led the sector with over 80% market share for the past five years. More than 300 Axcelis high-energy implanters have been installed worldwide; unmatched productivity and low cost of ownership have been the key factors driving the platform's success.

Axcelis representatives will be available to discuss the Paradigm technology and offer live remote tool demonstrations during the SEMICON West tradeshow being held July 14-16, 2003 at San Francisco's Moscone Center. Customers and press are invited to visit the Axcelis booth, number 702, in the South Hall at any time during the show.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.