Axcelis' Ultra Low Energy, High Current Ion Implant Systems Selected by Two Chipmakers.Business Editors/High-Tech Writers BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 7, 2003 Multi-Wafer GSD GSD German Shepherd Dog GSD Graduate School of Design GSD Glycogen Storage Disease GSD General Services Division GSD Gundam Seed Destiny (anime) GSD Ground Sample Distance GSD Geometric Standard Deviation Ultra's Productivity Key to Order Wins in Europe and Asia Pacific Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ), is continuing to see rapid adoption of its multi-wafer GSD Ultra low energy, high current ion implanter, with two additional orders for the system from semiconductor manufacturers in Europe and Asia Pacific. The orders mark the latest in a series of head-to-head competitive wins for Axcelis' Ultra product line, and demonstrate the increasing need for exceptional productivity and process control in advanced low energy, high current implant applications. Introduced last year, the GSD Ultra has become the preferred high current implant system at chipmakers around the globe by offering a highly productive platform for producing ultra shallow junctions and other advanced transistor structures on a volume scale. Axcelis has installed one system at a fab in Europe; the second system is expected to ship to a chipmaker chip·mak·er n. A manufacturer of electronic and integrated circuit chips. in Singapore this month. "As our customers move toward 100nm device production, productivity, process control and reliability become key considerations for high current implant applications," said Mike Luttati, chief operating officer Chief Operating Officer (COO) The officer of a firm responsible for day-to-day management, usually the president or an executive vice-president. of Axcelis. "This is why the GSD Ultra continues to capture market share and gain momentum with chipmakers worldwide. The system brings together Axcelis' field-proven multi-wafer GSD platform with new beamline innovations to give customers a significant wafer yield and cost-of-ownership advantage." The GSD Ultra employs Axcelis' new Ultra low energy beamline to shorten implant times, resulting in greater throughput and high current process productivity. The system draws on the benefits of a multi-wafer platform, which provides a short, simple and efficient beamline, and provides the best option for achieving excellent uniformity and process control. An innovative packaging design also provides easy maintenance access and maximum tool uptime. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. , rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com. Forward-Looking Statements This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, and increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission. |
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