Axcelis' RapidStrip 300mm Dry Strip Platform Selected by Major European Chipmaker; Breadth of Axcelis' Family of Cleaning Technologies Key Factor in Sale.

BEVERLY, Mass. -- Axcelis Technologies, Inc. (NASDAQ: ACLS) has won a significant order for multiple RapidStrip 320 photoresist strip systems from a major semiconductor manufacturer in Europe. This new customer chose Axcelis based on the strength of Axcelis' 300mm dry strip tool portfolio, which offers a full breadth of capabilities--from cost-efficient, standard dry strip techniques to advanced low-k dielectric applications.

Axcelis began shipping the RapidStrip 320 systems in the fourth quarter of 2004. The customer selected the low cost-of-ownership, high-throughput platform following an extensive head-to-head evaluation against a long-standing incumbent supplier.

"When it comes to dry strip and cleaning applications, our customers need suppliers who can address a wide range of applications needs and offer strong local support," said Mike Luttati, Axcelis' executive vice president and chief operating officer. "Axcelis' selection was based on our ability to deliver a highly cost-effective platform for this customer's full range of front-end-of-line cleaning needs, while also offering tools like the RadiantStrip 320Lk for the most challenging back-end-of-line applications."

Both the RapidStrip 320 and RadiantStrip 320Lk platforms continue to gain wide market acceptance throughout North America, Asia and Europe. Over the past several years, Axcelis has steadily expanded its line of cleaning platforms through key acquisition and technology development initiatives. The company currently holds 18 percent of the dry strip market, according to market researcher Gartner Dataquest.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.