Aviza Technology Announces Shipment of Omega(R) fxP(TM) DSi Process Module to Fraunhofer IPMS; Institute to Utilize Deep Silicon Etching for MEMS Devices.

SCOTTS VALLEY, Calif. -- Aviza Technology, Inc. (NASDAQ: AVZA), a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets, today announced that it has shipped an Omega(R) fxP(TM) DSi (deep silicon etch) process module to Fraunhofer Gesellschaft, Europe's largest organization for applied research & development. The DSi module will be fitted to an Omega fxP at Fraunhofer's Institute for Photonic Microsystems (IPMS) facility in Dresden, Germany. The current Omega fxP platform at Fraunhofer is already equipped with two M0RI process modules for dielectric and polysilicon etching.

The DSi module will be used to further develop and perform deep trench etching for MEMS (micro-electromechanical systems) devices. In particular, IPMS will etch high aspect ratio structures, required for a new bar code laser scanning technology that has been co-developed with Intermec Technologies Corp. The new MEMS-based scanner is more compact and reliable and offers longer lifetimes than conventional bar code scan engines currently on the market.

"We are pleased to be expanding the capabilities of our Omega etch platform by adding this DSi module," said Prof. Dr. Hubert Lakner, director at Fraunhofer IPMS. "We selected Aviza for our deep silicon etching because they were able to demonstrate the high aspect ratio features to meet our manufacturing requirements, while maintaining superior critical dimension (CD) control and uniformity."

Aviza's Omega fxP plasma etch system can be configured with up to six process modules to address a variety of applications. All process modules are based upon a standard design that allows tool expansion or migration between platforms as capacity demand increases. The DSi module is based on the Bosch gas switching approach and is applicable for a range of MEMS and wafer-level packaging (WLP) structures. Performance demonstrations conducted by Aviza on the Omega platform show that improved etch rates can be achieved in high aspect ratios without degrading the profile, CD control or ability to stop etching on oxide or metallic under layers. Such results are an indicator of the tool's ability to meet current and next-generation manufacturing requirements for photonic microsystems devices.

"This order once again demonstrates Aviza's ability to continually deliver superior deep silicon etch process technology to the MEMS market," said Kevin T. Crofton, Vice President and General Manager, PVD/CVD/Etch Business Unit of Aviza Technology, Inc. "By working with leading research and development groups, such as IPMS, Aviza can demonstrate Omega's production-proven process capabilities to customers who need production-ready and reliable etch solutions."

According to Yole Developpement, a leading French industry analyst group focused on microtechnologies and MEMS market analysis, the MEMS device market is currently estimated at approximately $5.8 billion worldwide and is expected to grow to an estimated 17 percent per year to 2010. Deep silicon etching represents one of the key process steps for MEMS manufacturing and is being implemented into volume production.

Aviza will be exhibiting at this year's SEMICON Europa exhibition, to be held from Tuesday, April 4, 2006 to Thursday, April 6, 2006. For more information about Aviza and its products, please visit the company in Hall A1, Booth 659 of the New Munich Trade Fair Centre in Munich, Germany.

Safe Harbor Statement

This press release contains forward-looking statements. These forward-looking statements are based on our management's current expectations and beliefs and involve numerous risks and uncertainties that could cause actual results to differ materially from expectations. You should not rely upon these forward-looking statements as predictions of future events because we cannot assure you that the events or circumstances reflected in these statements will be achieved or will occur. These forward-looking statements include, but are not limited to, the statements made by Kevin T. Crofton and all statements containing the words "believes," "expects," "may," "will," "should," "seeks," "intends," "plans," "estimates" or "anticipates" or the negative of these words and phrases or other variations of these words and phrases or comparable terminology. Many factors could cause our actual results to differ materially from those projected in these forward-looking statements. Some of these factors and other important factors are detailed in our various Securities and Exchange Commission filings, particularly in our most recent Annual Report on Form 10-K and Quarterly Report on Form 10-Q, copies of which are available from us without charge. Please review these filings and do not place undue reliance on these forward-looking statements. We assume no obligation to update forward-looking statements.

About Fraunhofer IPMS

Fraunhofer IPMS is one of 58 research institutes of Fraunhofer Gesellschaft, Europe's largest organization for Applied Research & Development. Fraunhofer Gesellschaft employs 12,500 staff, mainly Scientists and Engineers, at over 40 locations throughout Germany. Fraunhofer IPMS is focused on research, development and fabrication of photonic microsystems such as optical sensors, actuators for light deflection and modulation, readout and control ASICs for MOEMS, as well as complete imaging systems. IMPS currently employs around 180 Scientists and is in the process of expanding its facility in Dresden, supported by the Federal Ministry of Education & Research, the European Commission and the Free State Saxony. Building work started on the new clean-room facility in 2005 and it is expected to open during 2006. News from Fraunhofer is located at www.fraunhofer.de.

About Aviza Technology, Inc.

Aviza Technology, Inc. is a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets. Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD). The company is publicly traded on the NASDAQ National Market (NASDAQ: AVZA). Aviza is headquartered in Scotts Valley, Calif., with manufacturing, R&D, sales and customer support facilities located in the UK, Germany, France, Italy, Taiwan, China, Japan, Korea, Singapore and Malaysia. Additional information about the company can be found at http://www.avizatechnology.com.

Omega is a registered trademark of Aviza Technology, Inc. fxP is a trademark of Aviza Technology, Inc.