Asyst Technologies Inc. and Toshiba Corporation form strategic alliance; alliance to provide automated wafer transport systems based on Toshiba's magnetic levitation technology.

FREMONT, Calif.--(BUSINESS WIRE)--Oct. 24, 1995--Toshiba Corporation of Tokyo and Asyst Automation Inc. of Wilmington, Mass., the wholly owned subsidiary of Asyst Technologies Inc. (NASDAQ:ASYT), Tuesday announced that they have formed a strategic alliance to address the semiconductor industry's compelling need for fabwide automation.

By amalgamating Toshiba's patented Magnetic Levitation (MagLev) technology with Asyst's automated wafer stocking systems and material control software, the two companies have created a sophisticated "Space Linear" transport system that automatically moves and stores wafers throughout the integrated circuit (IC) manufacturing process.

Toshiba, one of the world's largest manufacturers of electronic machinery and semiconductors, originally developed its MagLev technology for internal use in its IC production fabs. To commercialize the technology -- which employs magnets to "float" wafer cargo vehicles along an overhead guide rail system -- Toshiba chose to partner with Asyst Automation, one of the world's leading suppliers of automated systems for cleanroom manufacturers.

Explained Toshiba's Sumitada Hatakeyama, general manager of International Operations -- Industrial Plant and Systems, "Asyst Automation's stocking systems offer superb functionality and universal compatibility. By integrating the two compatible systems, we can now offer a complete, production-proven solution."

Mitsui & Co. Ltd. of Tokyo, a leading trading firm of Japan, mediated the negotiations between Toshiba and Asyst Automation. Industry Forces Driving Fabwide Automation To sustain the semiconductor industry's projected growth, device makers must continually boost manufacturing productivity and yields while improving operating efficiencies.

Fabwide automation systems meet these mandates. Moreover, automation systems and software are inherently more adept at handling complex manufacturing processes -- an important consideration because more than 400 process steps are needed to create a single computer chip.

The negative impact of contamination on production yields is another factor behind the adoption of automated transport systems. It is estimated that global device makers currently spend billions of dollars to control contamination in their facilities. Automation addresses contamination concerns by removing one of the primary particulate contamination sources, humans, from the immediate vicinity of the wafer.

Finally, the anticipated transition to larger diameter 12-inch wafers is driving the move toward fabwide automation. By the year 2000, the first fabs are expected to produce next-generation devices on these larger substrates -- the size and weight of which necessitate increased automation for both worker comfort and safety.

Asyst/Toshiba to Bring Unique MagLev Technology to the Chip Industry

Capitalizing on each partner's strengths, the alliance addresses industry's need for a new kind of automation system.

With minimal redesign or engineering, the transport system offered by Toshiba and the storage system provided by Asyst Automation interface synergistically to cleanly and efficiently move wafers on a network of overhead guide rails that are magnetically connected to transport cargo vehicles.

When not being processed, wafer lots are transferred to automated stocking storage units. System software links the two systems together, enabling fab management to control the work in process (WIP).

The resulting system gives several proprietary benefits including better-than-Class 1 operation; a shunting scheme that enables vehicles to bypass one another, thereby increasing fab output; and a high level of reliability.

Company officials report Asyst will focus on marketing, sales and distribution in America and Europe, while Toshiba, Mitsui and Asyst will jointly conduct marketing and sales activities in Asia.

The new Space Linear Transport System will be tailored to meet the individual requirements of each customer, and then jointly installed and tested at each customer site. Toshiba and Asyst will continue to manufacture and service their individual systems.

Each system is available upon completion of a customer needs' assessment audit, with pricing dependent on system design and complexity.

About Asyst: Asyst Technologies Inc. is a leading provider of process control and automation systems that help semiconductor manufacturers reduce their integrated circuit production costs. Asyst Automation Inc. focuses on material handling control software and inter-bay/intra-bay automation. Founded in 1984, Asyst Technologies Inc. is headquartered in Fremont, Calif., with facilities in Europe and the Far East. Asyst Automation Inc. is located outside of Boston. The company's common stock trades on the NASDAQ Stock Market under the symbol ASYT.

About Toshiba: Toshiba Corp. is one of the world's largest integrated manufacturers of electric and electronic equipment, with more than 190,000 employees worldwide and 1994 revenues of US$54 billion. Toshiba's products span information/communication systems, information media and consumer products, power systems and industrial equipment, and electronic components such as semiconductors and color displays. -0-

Note to Editors: Photo and technical summary of the Space Linear Transport System available upon request. Please call Margaret Pereira at 415/968-8900.

CONTACT: Asyst Automation Inc.

David Feindel, 508/658-7300 Fax: [phone]

or

MCA Inc.

Margaret Pereira, 415/968-8900 Fax: [phone]