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Asyst Plus Portal Attains SEMI E78 Certification From Ion Systems.


Business Editors/High-Tech Writers

FREMONT, Calif.--(BUSINESS WIRE)--May 6, 2002

Tool's Compliance with Stringent Static-Discharge Standard

Facilitates Integration by OEM (Original Equipment Manufacturer) The rebranding of equipment and selling it. The term initially referred to the company that made the products (the "original" manufacturer), but eventually became widely used to refer to the organization that buys the products and  Customers, Contributes to Improving

Chipmakers' Overall Equipment Productivity

Asyst Technologies, Inc. (Nasdaq:ASYT), a leading provider of integrated automation solutions that maximize productivity for the semiconductor manufacturing industry, today announced that Ion Systems, Inc. has certified Asyst's Plus(TM) Portal equipment front end as compliant with the Semiconductor Equipment and Materials International Semiconductor Equipment and Materials International (SEMI) is a trade organization of manufacturers of equipment and materials used in the fabrication of semiconductor devices such as integrated circuits, transistors, diodes, and thyristors.  SEMI(R) E78-0998 electrostatic-discharge (ESD (1) (Electronic Software Distribution) Distributing new software and upgrades via the network rather than individual installations on each machine. See ESL. ) standard. Ion, the world's largest provider of electrostatics electrostatics, study of phenomena associated with charged bodies at rest (see charge; electricity). A charged body has an excess of positive or negative charges, a condition usually brought about by the transfer of electrons to or from the body.  management products and services, found that the Asyst tool fully complies with this standard's most stringent Level 1 ESD requirements. Preventing ESD-related chip damage and equipment downtime is essential for semiconductor manufacturers concerned with improving overall equipment productivity in their fabs.

As integrated circuit integrated circuit (IC), electronic circuit built on a semiconductor substrate, usually one of single-crystal silicon. The circuit, often called a chip, is packaged in a hermetically sealed case or a nonhermetic plastic capsule, with leads extending from it for  (IC) design rules shrink to deep-submicron feature sizes, the devices' susceptibility to ESD damage grows exponentially, increasing the chance of extreme yield losses or post-shipment device failure. This makes it even more critical for equipment makers to demonstrate that chips fabricated on their equipment will not be exposed to this type of damage. SEMI E78 was created through the SEMI international standards program to set criteria for limiting electrostatic charge Noun 1. electrostatic charge - the electric charge at rest on the surface of an insulated body (which establishes and adjacent electrostatic field)
electric charge, charge - the quantity of unbalanced electricity in a body (either positive or negative) and
 in production tools. Achieving Level 1 compliance, as Asyst's Plus Portal has done, indicates that the tool has no discernible electrostatic charging mechanism within its confines, thus offering superior reliability and cost of ownership.

Jon Sabol, Asyst's vice president, equipment solutions, said, "Our customers rely on us to provide the safest, most efficient and highest-quality automation solutions. Ion is a trusted provider of ionization ionization: see ion.
ionization

Process by which electrically neutral atoms or molecules are converted to electrically charged atoms or molecules (ions) by the removal or addition of negatively charged electrons.
 equipment to Asyst and is the recognized industry expert in performing third-party assessment of manufacturing tools' compliance to SEMI E78. By certifying that our Plus Portal conforms to the standard's most rigorous specifications, Ion has enabled us to optimize the tool's throughput and availability, strengthening its already formidable productivity and bottom-line benefits for both our OEM and chip customers."

"Ion is committed to helping its customers overcome ESD-related issues. That's why we've developed a test procedure for SEMI E78 compliance," stated Yuen Lee, senior vice president of Ion Professional Services (job) professional services - A department of a supplier providing consultancy and programming manpower for the supplier's products. . "Protection from chip damage and tool lock-up due to ESD allows process-tool makers to increase overall fab effectiveness."

Asyst's Plus Portal represents a complete automation solution for OEMs' wafer processing and metrology tools. Its advanced tool-automation capability builds on Asyst's expertise to bring together -- in one front-end package -- load ports, auto-ID technology, automation software, environmental control, and wafer-handling products. The Asyst equipment front end enables seamless integration An addition of a new application, routine or device that works smoothly with the existing system. It implies that the new feature or program can be installed and used without problems. Contrast with "transparent," which implies that there is no discernible change after installation.  of OEM tools into advanced fab automation systems, providing optimized design flexibility through custom solutions developed using proven standard modules. Asyst's vast OEM experience informs the development of each new Plus Portal generation.

Forward Looking Statements

Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks associated with the acceptance of new products and product capabilities and other factors more fully detailed in the Company's recent 10Q quarterly report on file with the Securities and Exchange Commission.

About Ion

Ion is the world's largest provider of electrostatics management products and services. Ion improves its customers' business results by providing a total solution to their electrostatic discharge and electromagnetic interference See EMI.  challenges. Ion is an ISO (1) See ISO speed.

(2) (International Organization for Standardization, Geneva, Switzerland, www.iso.ch) An organization that sets international standards, founded in 1946. The U.S. member body is ANSI.
 9001 and ANSI (American National Standards Institute, New York, www.ansi.org) A membership organization founded in 1918 that coordinates the development of U.S. voluntary national standards in both the private and public sectors. It is the U.S. member body to ISO and IEC.  ESD S20.20 - 1999 certified company. Founded in 1978, Ion is headquartered in Berkeley, Calif., with operations worldwide. For more information about Ion visit www.ion.com or call 800/367-2452.

About SEMI

Based in San Jose, Calif., SEMI(R) is an international industry association serving more than 2,500 companies participating in the semiconductor and flat panel display A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time  equipment and materials markets. SEMI maintains offices in Austin, Beijing, Boston, Brussels, Hsinchu, Moscow, Seoul, Singapore, Tokyo and Washington, D.C. For more information, visit SEMI on the Internet at www.semi.org.

About Asyst

Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor manufacturers to increase manufacturing productivity and protect investments in silicon wafers during the manufacture of integrated circuits, or ICs. The company offers a broad range of 200mm and 300mm solutions that enable the safe transfer of wafers and information between process equipment and the fab line throughout the IC fabrication fabrication (fab´rikā´shn),
n the construction or making of a restoration.
 process, while reducing IC damage caused by human, environmental, mechanical and chemical factors. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst's homepage is located at www.asyst.com.
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Publication:Business Wire
Geographic Code:1USA
Date:May 6, 2002
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