Asyst Connectivity Technologies Demonstrates Live e-Diagnostics Capability for International SEMATECH.

Business Editors/High-Tech Writers

AUSTIN, Texas--(BUSINESS WIRE)--Oct. 8, 2002

e-Diagnostics solutions are now being adopted by the semiconductor manufacturing industry, according to Asyst Connectivity Technologies Incorporated (ACTi), which recently completed a live Web-cast demonstration of advanced e-Diagnostics software for members of International SEMATECH (ISMT). As part of the ISMT sponsored initiative, ACTi demonstrated e-Diagnostics capabilities that are compliant with ISMT-published guidelines and with emerging SEMI Standards from the Object Based Equipment Model (OBEM) and Diagnostics Data Acquisition (DDA) Task Force groups.

"Integrated circuit (IC) manufacturers see e-Diagnostics technology as a key enabler to improving fab productivity and return-on-investment (ROI), especially in 300mm fabs," said Harvey Wohlwend, manager of e-Diagnostics at ISMT. "International SEMATECH is indeed pleased with the cooperation we've received from suppliers in promoting the benefits of a common industry-wide approach to the challenges of e-Diagnostics."

Jim Macek, chief executive officer for ACTi, stated, "ISMT is providing a much-needed service to the industry by inviting suppliers of e-Diagnostics solutions to demonstrate both application capabilities and compliance to industry guidelines with equipment in its Advanced Tool Development Facility (ATDF). Today's demonstration is a clear announcement of ACTi's intention to become a leading supplier of e-Diagnostics connectivity solutions to the semiconductor industry." Macek continued, "ACTi further demonstrated the viability of implementing e-Diagnostics solutions today while also providing an evolutionary, scalable solution to meet both present and future needs of 300mm, sub-100 nanometer equipment data collection initiatives. ISMT is at the forefront of technology adoption, and we believe this demonstration of e-Diagnostics in a live manufacturing environment using Asyst Technologies' sorters is a significant contribution to the industry's progress in this key technology arena."

The live demonstration focused on a commercially available e-Diagnostics solution developed specifically to meet the Level 0/1 e-Diagnostics capability requirements as defined by ISMT and to provide equipment engineers and technicians with secure access to tools and tool-level data from remote locations. ACTi has been actively involved with the ISMT e-Diagnostics working groups as well as SEMI Standards Task Force activities to ensure a software solution that is secure, flexible, and able to adapt to many equipment types and communication protocols, fully compliant with Level 0/1 definition, and scalable to meet equipment supplier Level 2/3 capabilities as they become more clearly defined.

At the core of the solution is ACTi's ACTion Suite(TM) framework, which offers a secure, contemporary, industry standard approach for Internet-based fab-to-tool supplier connectivity as defined by the ISMT e-Diagnostics working group, further providing remote tool access, data collection and control in support of e-Diagnostics collaboration activities.

ACTi demonstrated these capabilities on an Asyst Model 4300, 4-port, 300mm Sorter currently in use at the ISMT Advanced Tool Development Facility located in Austin, Texas. ACTion Suite interactively provided the information necessary for e-Diagnosis, and further demonstrated the use of XML for storing real-time tool data and viewing information using a Web browser. The ACTion Observer(TM) allows browsing of one or more equipment models with simultaneous data collection and analysis using Microsoft(TM) Excel(TM) in real-time. Upon completion of installation and deployment, different operational scenarios were run to validate the ability to effectively collaborate and perform remote diagnostics between ISMT as the IC maker and Asyst as the equipment supplier.

About Asyst Connectivity Technologies, Inc.

ACTi, an Asyst Technologies Company (Nasdaq:ASYT) (www.asyst-connect.com), provides the semiconductor industry and related markets with tool connectivity software products, as well as factory and system integration and automation services. The company enables high levels of factory integration and automation through application of knowledge, reusable processes, procedures, products and solutions built upon contemporary, commercial software technologies, and industry standards. ACTi products are designed to maximize return on investment by improving yield and quality, and reducing cycle-time and cost. ACTi is comprised of semiconductor factory integration, automation, and information technology architects and practitioners offering an impressive record of successful automation solutions and delivery.

ACTi and ACTion Suite are trademarks of Asyst Connectivity Technologies, Inc. Other products or company names are used for identification purposes only, and may be trademarks of their respective owners.