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Asian Customer Purchases Multiple Surface Conditioning Systems From FSI International.


Business Editors

MINNEAPOLIS--(BUSINESS WIRE)--March 15, 2000

FSI FSI Foreign Service Institute
FSI Fluid Structure Interaction
FSI Fuel Stratified Injection
FSI Federazione Scacchistica Italiana (Italian Chess Federation)
FSI Free Standing Insert
FSI Flight Simulator
 International, Inc. (Nasdaq:FSII FSII Fuel System Icing Inhibitor (MIL-I-27686) ) announced today that a Taiwan foundry customer has placed orders totaling nearly $7.0 million for its ZETA ze·ta
n.
Symbol The sixth letter of the Greek alphabet.
(TM) 200 and MERCURY(R) Surface Conditioning Systems, to be used in photoresist A film used in photolithography that temporarily holds the pattern of a circuit path or microscopic element of a chip. When exposed to light, it hardens and is resistant to the acid bath that washes away the unexposed areas. Not to be confused with photoresistor.  stripping applications. These systems will add to the significant installed base of MERCURY systems placed throughout this customer's Asian semiconductor manufacturing sites. All orders are subject to cancellation or delay by the customer.

"This sale reflects the rising interest in FSI's surface conditioning systems for the foundry market," says Dale A. Courtney, president of the Surface Conditioning Division. "Our customers recognize that both the ZETA 200 and MERCURY systems have the long-term productivity and process extendibility advantages needed for photoresist stripping applications in the demanding foundry business."

The ZETA 200 Surface Conditioning System is based on high mass transfer centrifugal centrifugal /cen·trif·u·gal/ (sen-trif´ah-gal) efferent (1).

cen·trif·u·gal
adj.
1. Moving or directed away from a center or axis.

2.
 spray technology, which delivers superior process efficiency and performance in a small footprint. The System's process efficiency results in reduced chemical and water consumption that are important factors for semiconductor manufacturers who are serious about minimizing environmental impact. Furthermore, the ZETA System provides very advanced process control that includes a single closed nitrogen-purged process chamber, temperature and flow-compensated chemical processing and an on board diagnostic system. The ZETA 200-mm System ranges in price from $1.6 to $2.0 million depending on the model and its configuration.

The MERCURY Surface Conditioning System uses centrifugal spray technology to condition the surface of silicon wafers wafers

compressed roughage in flat plates useful for feeding to animals in transit.
. All processing functions occur within a constant environment in the system's closed, nitrogen-purged chamber. The System's process efficiency results in reduced chemical and water consumption that are important factors for semiconductor manufacturers who are serious about minimizing environmental impact. The MERCURY System ranges in price from $600,000 to $750,000 depending on the model and its configuration.

This order was received through Metron Technology (Nasdaq: MTCH), FSI's affiliated distributor in Europe and the Asia-Pacific Region. Metron is a leading global provider of marketing, sales, service and support solutions to semiconductor materials Semiconductor materials are insulators at absolute zero temperature that conduct electricity in a limited way at room temperature (see also Semiconductor). The defining property of a semiconductor material is that it can be doped with impurities that alter its electronic properties  and equipment suppliers and semiconductor manufacturers. Metron has the ability to provide product service and support in all major semiconductor manufacturing markets in the world, except Japan.

FSI International, Inc. is a leading global supplier of processing equipment used at key production steps to manufacture microelectronics microelectronics, branch of electronic technology devoted to the design and development of extremely small electronic devices that consume very little electric power. . The company develops, manufactures, markets and supports products used in the technology areas of microlithography, surface conditioning and low-k spin-on dielectrics. FSI International's customers include microelectronics manufacturers located throughout North America North America, third largest continent (1990 est. pop. 365,000,000), c.9,400,000 sq mi (24,346,000 sq km), the northern of the two continents of the Western Hemisphere. , Europe, Japan and the Asia-Pacific region.

Additional information on FSI International can be obtained by accessing its homepage at http://www.fsi-intl.com.
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Publication:Business Wire
Date:Mar 15, 2000
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