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Applied Materials Ships 100th Ultima HDP-CVD Centura System to Toshiba; Market Leading HDP-CVD System Now Used by 17 of Top 20 Chipmakers.


SANTA CLARA Santa Clara, city, Cuba
Santa Clara (sän`tä klä`rä), city (1994 est. pop. 217,000), capital of Villa Clara prov., central Cuba.
, Calif.--(BUSINESS WIRE)--Oct. 1, 1998--Applied Materials, Inc. has passed a milestone in HDP-CVD technology by shipping 100 Ultima HDP-CVD(TM) (high density plasma - chemical vapor deposition Vapor deposition

Production of a film of material often on a heated surface and in a vacuum. Vapor deposition technology is used in a large variety of applications.
) Centura(R) systems to customers worldwide.

Already the industry's leading system for HDP-CVD, the Ultima is being used by semiconductor manufacturers for a wide variety of dielectric CVD CVD Cardiovascular disease, see there  gap-fill applications, including shallow trench isolation Shallow trench isolation (STI) is an integrated circuit feature which prevents electrical current leakage between adjacent semiconductor device components. STI is generally used on CMOS process technology nodes of 250 nanometers and smaller.  (STI STI systolic time intervals. ) and intermetal dielectrics for sub-0.25 micron generation devices.

In addition, the Ultima is the only system currently being used in production for FSG See Linux Foundation.  (fluorinated fluorinated

material to which a fluoride has been added, e.g. water for human consumption treated as a prophylaxis against tooth decay.
 silicate glass) reduced dielectric constant (low (kappa)) films.

The 100th system was shipped to Toshiba, a leading Japanese semiconductor manufacturer and pioneer in HDP-CVD technology applications. As production tool of record, the Ultima system will be used at Toshiba to manufacture state-of-the-art memory and logic devices.

"Over the past year our market leadership has steadily increased as customers discovered the remarkable flexibility of the Ultima system," noted Farhad Moghadam, vice president and general manager of the HDP-CVD Product Unit and Emerging DCVD Technologies at Applied Materials.

"Several major logic customers are now beginning to implement our FSG process as a critical first step on the road to low (kappa) films, since the process is easy to integrate into existing aluminum interconnect structures for immediate benefits in device speed.

"The Ultima has also become the leader in CVD for shallow trench isolation, where the system combines outstanding gap fill with extremely high quality oxide and attractive cost of ownership."

Applied Materials was reported by market researcher Dataquest to have over 48 percent share of the HDP-CVD market in 1997. This year, with 17 out of the top 20 semiconductor manufactures using the Ultima HDP-CVD Centura, Applied Materials estimates that its market share has grown significantly and that the Ultima is now the industry's leading system for shallow trench isolation and FSG applications, as well as for intermetal dielectrics.

According to VLSI VLSI: see integrated circuit.


(1) (Very Large Scale Integration) Between 100,000 and one million transistors on a chip. See SSI, MSI, LSI and ULSI.

(2) (VLSI Technology, Inc., Tempe, AZ, www.semiconductors.
 Research, another market research firm, the HDP-CVD market is estimated to be $319 million in 1998 and is expected to grow to $1.4 billion by 2003.

The Ultima system was introduced in November 1996 and has rapidly gained acceptance as the industry's most cost-effective, reliable HDP-CVD system. In addition to its advanced multi-generational film deposition capability, the Ultima features Applied Materials' revolutionary Remote Plasma Clean technology which cuts operating costs by eliminating chamber consumables and significantly extends system uptime.

The first "green" CVD system, the Ultima system emits virtually no global warming gases, eliminating the need for exhaust scrubbers. Remote Plasma Clean technology also enables the low contamination levels required for STI applications.

Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market System under the symbol "AMAT AMAT Applied Materials (stock symbol)
AMAT Average Memory Access Time
AMAT Automatic Message Accounting Transmitter
AMAT Anti-Materiel (bomb or mine)
AMAT Ageing Management Assessment Team
." Applied Materials' web site is http://www.AppliedMaterials.com.
COPYRIGHT 1998 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 1998, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Oct 1, 1998
Words:482
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