Applied Materials Selects Therma-Wave's Opti-Probe Film Thickness Measurement System for Customer Qualification of Mirra 3400 CMP Systems.FREMONT, Calif.--(BUSINESS WIRE)--Feb. 10, 1997--Therma-Wave, Inc., one of the fastest growing metrology companies in the semiconductor capital equipment industry, today announced that the company has received an order from Applied Materials Applied Materials, Inc. NASDAQ: AMAT (HKSE: 4336 ) is the global leader in nanomanufacturing technology solutions with a broad portfolio of innovative equipment, service and software products for the fabrication of semiconductor chips, flat panel solar displays, solar , Inc., Santa Clara Santa Clara, city, Cuba Santa Clara (sän`tä klä`rä), city (1994 est. pop. 217,000), capital of Villa Clara prov., central Cuba. , Calif., for an Opti-Probe 2600 Film Thickness Measurement System. The system will be shipped this month. Applied Materials will utilize the Opti-Probe 2600 in its demonstration laboratory during customer qualification of the company's Mirra 3400 CMP CMP (cytidine monophosphate): see cytosine. (1) (CMP Media LLC, Manhasset, NY, www.cmp.com) Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information (Chemical Mechanical Polishing) systems. David Willenborg, Therma-Wave's vice president of marketing, said, "We are pleased that Applied Materials has selected the Opti-Probe for customer qualification in their demo lab. Several of Applied Material's Mirra CMP customers are currently using Opti-Probe 2600 systems for post-CMP measurement in their fabs worldwide. As a result of their positive experience, we believe that as the Mirra systems installed base grows, many of Applied Material's new customers will also select the Opti-Probe for their post-CMP measurement requirements. In full production one Opti-Probe can support two to five CMP tools. "Applied Material's selection further validates the benefits of the unique combination of technologies found in the Opti-Probe. Post-CMP measurements are intensive and difficult. The Opti-Probe's multiple technologies minimize the problems associated with "cycle skipping," and offers unique simultaneous, independent, multiparameter measurements of thick and thin films. The Opti-Probe also addresses two other important CMP issues; across-the-wafer uniformity (global planarity) and within-the-die planarity (microplanarity)," noted Willenborg. The Opti-Probe 2600 offers several other features required in CMP measurements. The simultaneous, independent measurement capability minimizes under and over-polishing. The 0.9 micron spot size, the industry's smallest, controls polish rate and detects polish slopes on areas as small as seven microns square. Mapping, pattern recognition and the ability to use a single recipe for all stacks simplify measurements. The Opti-Probe is the industry's most powerful film thickness measurement system. Its unique combination of technologies, patented Beam Profile Reflectometry (BPR (Business Process Reengineering) See reengineering. BPR - Business Process Re-engineering ), patented Beam Profile Ellipsometry (BPE BPE abbr. Bachelor of Physical Education ), and spectrophotometry spectrophotometry Branch of spectroscopy dealing with measurement of radiant energy transmitted or reflected by a body as a function of wavelength. The measurement is usually compared to that transmitted or reflected by a system that serves as a standard. , provide the capability to deliver highly accurate multiparameter measurements on complex film stacks, and 0.1 angstrom angstrom (ăng`strəm), abbr. Å, unit of length equal to 10−10 meter (0.0000000001 meter); it is used to measure the wavelengths of visible light and of other forms of electromagnetic radiation, such as ultraviolet precision on ultra-thin films. About Applied Materials Applied Materials, Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on :AMAT AMAT Applied Materials (stock symbol) AMAT Average Memory Access Time AMAT Automatic Message Accounting Transmitter AMAT Anti-Materiel (bomb or mine) AMAT Ageing Management Assessment Team ) is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials' web site is www.appliedmaterials.com About Therma-Wave Using proprietary laser-based technology, Therma-Wave, Inc. designs, manufactures and markets nondestructive non·de·struc·tive adj. Of, relating to, or being a process that does not result in damage to the material under investigation or testing. non metrology and inspection systems for film thickness measurement and ion implant monitoring of advanced semiconductor devices. Therma-Wave's World Wide Web address is http://www.thermawave.com. -0- Note to Editors: Opti-Probe is a trademark of Therma-Wave Inc. Mirra are trademarks of Applied Materials, Inc. CONTACT: The Loomis Group, Inc. Brenda Bonneville, 415/882-9494 brenda@loomisgroup.com or Therma-Wave, Inc. Bob Casey, 510/490-3663 bcasey@thermawave.com |
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