Applied Materials Launches New High Productivity CVD Processing Platform; Compact Size, Exceptional Throughput, Reliability & Serviceability Make DxZ Optima the Ideal Platform for High-Volume CVD Applications.

SANTA CLARA, Calif.--(BUSINESS WIRE)--Nov. 6, 1996--Applied Materials has released a new, compact, low cost-of-ownership platform, called the DxZ Optima, for high-volume, intermetal dielectric (IMD) and passivation CVD applications.

Utilizing the same basic single-wafer, multi-chamber architecture as the company's industry-pioneering Precision 5000 platform, the DxZ Optima has numerous productivity features that significantly increase system throughput, reliability and serviceability. Its small footprint and efficient design make it especially attractive in fabs with limited manufacturing space.

"The DxZ Optima platform provides another attractive option to our customers for low-cost, high throughput and high reliability CVD processing. We've kept the Precision 5000's small size but re-engineered the platform with our latest advances in wafer handling and system design," said Dr. Ashok Sinha, president of Applied Materials' CVD Product Business Group.

"Complementing our Centura-based products, the DxZ Optima is targeted for standalone blanket dielectric PECVD applications that don't require the Centura's higher vacuum capabilities. This platform gives our customers another cost-effective way to use Applied Materials' performance-proven dielectric CVD technologies in their high-volume production lines."

For fast and consistent wafer transfers, the DxZ Optima features an advanced wafer handling system that employs a field-proven, highly reliable, magnetically-coupled robot. Delivering a 2x improvement in wafer transfer time over the Precision 5000, the DxZ Optima provides a maximum platform throughput of greater than 80 wafers per hour.

Top-mounted electronics, streamlined facilities handling, and a low frame height provide excellent serviceability -- allowing quick and easy access for system maintenance.

The DxZ Optima easily integrates the growing family of "xZ"-series CVD chambers which use no consumable parts and have low cost-of-ownership. The DxZ chamber is available for deposition of a wide variety of silane and TEOS-based dielectric CVD films. There are also more than 2,200 Applied Materials dielectric CVD chambers in use worldwide that can be accepted on the DxZ Optima platform.

Shipments of DxZ Optima systems began in the fourth calendar quarter of 1996. The Precision 5000 CVD system will remain available for customers wanting to add capacity with identical installed-base systems. Several key components of the DxZ Optima platform also have been designed for retrofittability to more than 1500 Precision 5000 CVD systems installed in customer fabs around the globe.

Applied Materials Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market under the symbol "AMAT." Applied Materials' web site is http://www.AppliedMaterials.com.

CONTACT: Applied Materials Inc.

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