Applied Materials Announces Technology and Productivity Breakthrough with New PRODUCER System.

SANTA CLARA, Calif.--(BUSINESS WIRE)--July 1, 1998--

Innovative Dielectric Deposition System Sets a New Benchmark in Cost-Efficient Manufacturing

Applied Materials, Inc., the world's leading supplier of wafer fabrication equipment to the semiconductor industry, introduces Producer(TM), an ultra-high productivity system for depositing blanket dielectric films on sub-0.18 micron devices. Using a revolutionary new platform architecture, Producer combines the throughput benefits of twin wafer handling with the advantages of single-wafer process technology in a simple and exceptionally reliable system design.

"The Producer system addresses a new era in device manufacturing which demands higher yields, lowest cost and maximum asset utilization," said Sass Somekh, senior vice president of Applied Materials. "Its innovative architecture sets a new standard in cost-efficient, advanced-technology wafer processing that can be applied to many future applications. Built to support multiple device generations as well, Producer is uniquely capable of processing both 200mm and 300mm wafers using the same platform."

Compared to currently available systems, the Producer's new platform offers a major improvement in productivity as well as reduced facilities cost and a smaller system footprint. Featuring a central transfer chamber mounted with up to three Twin Chamber(TM) CVD modules, the wafers are transferred in pairs to each module. Up to six wafers can be processed simultaneously, achieving throughputs of more than 110 wafers per hour. To simplify system design without sacrificing the flexibility and control of single-wafer processing, each Twin Chamber set uses the same pumps, mass flow controllers and gas delivery components.

"Simplicity was the focus of our hardware design and high output was our performance goal," noted Kevin Fairbairn, general manager of Applied Materials' PECVD Product Division. "For exceptional production reliability, Producer incorporates many of Applied Materials' time-tested components including its magnetically-coupled VHP wafer transfer robot. The Producer's Twin Chambers are also extensions of the production-proven hardware and process technology found in Applied Materials' industry-leading plasma CVD products.

"This combination of simplicity and industry-proven design also result in very high system uptime and easy serviceability," adds Fairbairn. "Extensive marathon testing has confirmed the superior uniformity and repeatability of the Twin Chamber design. In addition, process parameters such as deposition rate and particle performance are virtually identical to, or better than, those demonstrated by the advanced chambers found on our other platforms."

Producer is currently offered for PECVD applications including blanket oxides (TEOS or silane-based), silicon nitrides and dielectric anti-reflective coatings (DARC(TM)). Several of these films will be needed to form copper interconnect damascene structures.

Each Twin Chamber module uses Applied Materials' remote clean technology to remove deposited byproducts while minimizing damage to system hardware and reducing cost of ownership. This unique "soft" clean process creates virtually no global-warming perfluorocompounds (PFC) and enables significant reduction in chamber clean frequency for very high equipment uptime and availability.

The market for dielectric CVD equipment is one of the largest of the semiconductor equipment markets. Dataquest estimates the 1997 dielectric CVD market to be $1.50 billion, and forecasts it to grow to $2.92 billion by 2001. Applied Materials is the global market leader in CVD, including both dielectric and metal applications.

Advance commitments for Producer totaling more than $28 million have been received from customers in North America, Europe, Taiwan and Japan. Both 200mm and 300mm Producer systems have already been shipped to customers, with production ramping for the 200mm systems expected to begin in the third calendar quarter of 1998.

Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market System under the symbol "AMAT." Applied Materials' web site is http://www.AppliedMaterials.com.

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