Applied Komatsu Technology Passes 75th TFT System Shipment; Leadership in Flat Panel Display Equipment Market Supported by Multi-chamber Architecture Patent.KOBE, Japan--(BUSINESS WIRE)--Sept. 16, 1996--Applied Komatsu Technology (AKT), a leading producer of PECVD PECVD Plasma-Enhanced Chemical Vapor Deposition (Plasma Enhanced Chemical Vapor Deposition Chemical vapor deposition (CVD) is a chemical process used to produce high-purity, high-performance solid materials. The process is often used in the semiconductor industry to produce thin films. ), PVD PVD abbr. peripheral vascular disease PVD Peripheral vascular disease, see there (Physical Vapor Deposition  This article or section is in need of attention from an expert on the subject.Please help recruit one or [ improve this article] yourself. See the talk page for details. ) and Etch systems for Active Matrix Liquid Crystal Display liquid crystal display (LCD) Optoelectronic device used in displays for watches, calculators, notebook computers, and other electronic devices. Current passed through specific portions of the liquid crystal solution causes the crystals to align, blocking the passage of light. (AMLCD (Active Matrix LCD) See active matrix. ) manufacturing, has passed its 75th system shipment. Norman Turner, AKT vice president of product operations, said: "Our systems and process technologies are proving themselves in high-volume, cost-effective production at most of the major AMLCD manufacturers. We are the global market leader in PECVD, and are extending our market share in PVD (sputtering) and etch, especially as our third-generation platform, the AKT 3500, becomes the standard for larger substrates." In July 1996, the AKT PECVD 3500 system received the Grand Prize award for display manufacturing equipment at the Fine Process Technology Exhibition and Seminar in Tokyo. The company's single-substrate, multi-chamber system architecture has played a decisive role in AKT's industry-leading market position, complementing its advanced TFT process technologies. The architecture has received U.S. patent 5,512,320, and patent applications for this technology are pending in Japan and Europe. Beginning in 1991 as Applied Materials' Display Technology organization, and continuing with the formation of AKT in 1993, the company has pioneered the cluster concept of single-substrate processing for LCD panel manufacturing. AKT's 1600 platform processes 400mm x 500mm substrates at high throughput (up to 60 substrates per hour) with fully automated glass handling. In 1995, the same platform architecture was scaled up as the AKT 3500 model, for substrates 550mm x 650mm in size. Both systems employ single-substrate process chambers, as well as dual loadlocks which each can be loaded with a batch of substrates. A key feature of the unique architecture is its preheat chamber, which heats the glass substrates slowly (more than seven minutes) in a batch before processing. With substrates already heated to near process temperature in the preheat module, rapid processing times of up to one substrate per minute make the systems highly cost-effective in high-volume manufacturing. After processing, the substrates are returned to a cooling cassette in either loadlock, which permits a long cooldown cool·down n. A period following strenuous physical activity in which stretching or milder exercise is performed to allow the body gradually to return to normal. time. Applied Komatsu Technology Inc. is a global company focusing on TFT-LCD TFT-LCD Thin Film Transistor - Liquid Crystal Display manufacturing equipment, providing advanced technology solutions to TFT panel manufacturers worldwide. CONTACT: Applied Komatsu Technology Inc. Betty Newboe, 408/563-0647 (editorial/media) Charles Lewis, 408/748-5819 (editorial/media) |
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