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Amtech Systems Inc. announces commitment for the final phase of feasibility research on its photo-CVD technology.


TEMPE, Ariz.--(BUSINESS WIRE)--March 4, 1996--Amtech Systems Inc. (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
:ASYS) Monday reported that its board has authorized an additional $157,000 for the final phase of feasibility research on the company's photo-assisted CVD CVD Cardiovascular disease, see there  (chemical vapor deposition Chemical vapor deposition (CVD) is a chemical process used to produce high-purity, high-performance solid materials. The process is often used in the semiconductor industry to produce thin films. ) technology by Roger W. Anderson Phd. and his research team at the University of California, Santa Cruz The University of California, Santa Cruz, also known as UC Santa Cruz or UCSC, is a public, collegiate university, one of the ten campuses of the University of California. .

This final phase is to determine whether the light source under investigation will be commercially acceptable both in terms of functionality and deposition rate, without the use of mercury gas. It is presently anticipated that this final phase of the feasibility study will require approximately one year. The increased financial commitment will be expensed as incurred, starting in March or April of 1996. The company's previously outstanding commitment of $87,000 will be recognized in the second quarter of fiscal 1996, which ends March 31, 1996.

Amtech Systems Inc. manufactures capital equipment for use in the production of semiconductors, including the Tempress(R) Systems' horizontal diffusion furnace, ATMOSCAN(R), an environmentally controlled wafer processing system, IBAL IBAL Irish Business Against Litter , modular robotic devices which automate the process of wafer loading and unloading, and load stations, which load Tempress(R) and other brands of furnaces.

CONTACT: Amtech Systems Inc., Tempe

Robert T. Hass, 602/967-5146
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Publication:Business Wire
Date:Mar 4, 1996
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