Amtech Systems Inc. announced a delay in completing feasibility study.

TEMPE, Ariz.--(BUSINESS WIRE)--May 23, 1995--Amtech Systems Inc. (NASDAQ:ASYS) Tuesday reported that the feasibility study being conducted on its patented photo-assisted CVD technology will not be completed until the end of October 1995.

The primary cause of the delay is that one of the three Ph.D.'s working on the study left to accept other employment and a qualified replacement could not be found for the short period remaining.

During March 1994, the company entered the Research Agreement with the Regents of the University of California at Santa Cruz ("University"). Pursuant to the Research Agreement a feasibility study is being undertaken by the University under the direction of Roger W. Anderson, Ph.D.

The objective of the study is to confirm the feasibility of a product embodying the company's patented photo-assisted CVD technology. The study which was to have been completed by April 30, 1995 and was extended to June 30, 1995, due to a late start, now is expected to be completed by Oct. 30, 1995. Roger W. Anderson, Ph.D., continues to actively direct the feasibility study. The company does not anticipate any increase in the cost of the study.

Amtech Systems Inc. manufactures capital equipment used in the production of semiconductors, including Atmoscan(R), an environmentally controlled wafer processing system, IBAL, modular robotics devices which automate the process of wafer loading, load stations, and now the semiconductor horizontal diffusion furnaces which they load.

In addition, through its Baltimore based wholly-owned subsidiary, Echelon Service Co., Amtech provides technical contract personnel services to customers in the corridor stretching from Philadelphia to Northern Virginia.

CONTACT: Amtech Systems Inc., Tempe

Robert T. Hass, 602/967-5146