Amtech Systems Inc. Announces Upcoming Annual Meeting.

TEMPE, Ariz. -- Amtech Systems Inc. (Nasdaq: ASYS) ("Amtech" or the "Company") announced that it will hold its Annual Meeting of Shareholders on July 8, 2005, at the Hilton Phoenix Airport Hotel in Phoenix, Arizona.

The proxy statement to be mailed to shareholders in connection with the Annual Meeting will include proposals for the election of four directors to the Company's Board of Directors. Three of the directors will be elected by the holders of the Company's common stock and one director will be elected by holders of the Company's preferred stock. As previously announced, the preferred stock shareholders have the right and power to elect one director. Mr. Robert M. Averick has been recommended for nomination for such directorship by a holder of the Company's preferred stock. Mr. Averick is currently a Vice President, Portfolio Manager at Richard L. Scott Investments, LLC ("RLSI"), a family investment office located in Stamford, Connecticut. Mr. Averick received an undergraduate degree in Economics from The University of Virginia and a Masters in Business Administration in Finance and Entrepreneurial Management from The University of Pennsylvania, The Wharton School of Business. Nominated for re-election by the common stock shareholders will be Mr. Robert F. King, who has served on the Board since May, 2003; Mr. Jong S. Whang, the CEO of the Company, and Mr. Robert T. Hass, the CFO of the Company. Mr. Alvin Katz and Mr. Bruce R. Thaw, who have served on the Board since 1995, will serve on the Board for the remainder of their term, but will not be standing for re-election. Consequently, there will be one vacancy on the Board after the Annual Meeting, which the Company expects to fill in the near future.

Mr. J.S. Whang, President and Chief Executive Officer, stated, "We would like to thank Mr. Katz and Mr. Thaw for their many years of service on our Board of Directors. We appreciate their assistance in growing the Company over the last 10 years. We also look forward to working with Mr. Averick, as well as with Mr. King, as we continue our growth in the coming years."

Amtech Systems, Inc. manufactures capital equipment and related consumables used in the manufacture of various thin-wafer materials, primarily silicon wafers for the semiconductor industry, and certain thermal processes and related automation used in fabricating semiconductor devices, MEMS and solar cells. These products include horizontal diffusion furnaces, and related automation and polishing carriers, templates and machines.

The Private Securities Litigation Reform Act of 1995 provides a "safe harbor" for forward-looking statements. Certain information included in this press release (as well as information included in oral statements or other written statements made or to be made by Amtech Systems, Inc.) contains statements that are forward-looking. Such forward looking information involves a number of known and unknown risks and uncertainties that could cause actual results to differ materially from those discussed or anticipated by management. Potential risks and uncertainties include, among other factors, industry specific and general business conditions, competitive market conditions, success of Amtech's growth and sales strategies, the possibility of customer changes in delivery schedules, cancellation of orders, potential delays in product shipments, delays in obtaining inventory parts from suppliers, failure to satisfy customer acceptance requirements, difficulties in collecting receivables and the effects of Staff Accounting Bulletin No. 104, "Revenue Recognition in Financial Statements," issued by the Securities and Exchange Commission.