AlliedSignal Provides Flexibility, Innovation to Photoresist Stabilization and Spin-On Polymer Curing Market with its New ElectronCure 1200 System.

SAN FRANCISCO--(BUSINESS WIRE)--July 13, 1998--

Electron Beam Stabilization Before Implant and Etch Results in Significant Gains in Yield, Resolution and Process Margins

AlliedSignal's Electron Vision Group, an AlliedSignal Electronic Materials business enterprise, announced today the ElectronCure 1200 system, a new electron beam curing tool that will provide flexibility and innovation in the stabilization of photoresist and DUV resist as well as spin-on polymer curing.

The system, demonstrated here at the SEMICON West 98 exposition, incorporates a new modular design for Electron Vision's successful ElectronCure process tool. It includes AlliedSignal's proprietary "flood" electron beam source that enables uniform exposure over large areas. Two valuable applications for the ElectronCure 1200 and critical elements in integrated circuit wafer fabrication are stabilization of photoresist and DUV resist prior to the ion implant and etch steps.

For ion implant, e-beam stabilized resist reduces outgassing and chamber pressures, thus enabling higher energy compared with ultraviolet (UV)/bake processes. Reduced outgassing eliminates "popping," which results in lower particle generation in the implant chamber and less "down" time for cleaning. Higher implant currents mean increased throughput. The ElectronCure 1200 process also lowers dose error, reduces feature distortion during stabilization and improves throughput of the resist removal step. The improved removal process characteristics work to increase yield and reduce rework and defects.

The ElectronCure process can also improve resist performance during the etch step. E-beamed i-line and DUV resists have shown improvements in selectivity to metal, polysilicon and oxide etch of up to 50 percent over unstabilized layers and 20-30 percent over UV/bake stabilized layers. Benefits of improved etch selectivity include improved process margins, improved critical dimension control and the potential for reduced resist thickness. Reducing the resist thickness can enable better resolution, a larger usable depth of field and the possible extension of existing lithography processes into future design rules.

The ElectronCure tools are also being used to cure various spin-on polymers, including spin-on glasses and polyimides at lower temperatures than traditional thermal cures.

The ElectronCure 1200 can serve as a multi-module cluster tool or as a single module stand-alone system, with optional attachments to accommodate the needs of each customer's individual production environment.

"The driving force behind the design of the ElectronCure 1200 is the fact that semiconductor fabrication requirements are not always the same," commented Ken Livesay, marketing manager of AlliedSignal's Electron Vision Group, based in San Diego. "The basic design of the system, combined with the optional add-ons, results in a system that can be implemented into virtually every type of work environment."

The ElectronCure 1200 can be easily configured for either "bulkhead" installation through the cleanroom wall to a core area or it can be "island"-mounted entirely inside the cleanroom. In either case, the system can accommodate up to three ElectronCure process modules to adapt to the user's needs. The handler module includes robotics as a standard feature, with optional interface attachments for SMIF and AGV automation. It can also be ordered with a self-contained mini-environment. The system is capable of processing 150 mm to 200 mm wafer sizes.

AlliedSignal Electronic Materials, a strategic business unit of AlliedSignal Inc. (NYSE:ALD), provides advanced semiconductor interconnect technology solutions to the global semiconductor and electronics industries, and employs 3,000 people worldwide. Based in Los Gatos, Calif., it has sales, marketing and manufacturing facilities in California, Wisconsin, Arizona, New York, South Carolina, Indiana, Taiwan, China, Singapore, Germany and India. Its businesses include Advanced Microelectronic Materials (AMM), AlliedSignal Substrate Technology & Interconnects (ASTI), Amorphous Metals, Laminate Systems, Oak-Mitsui and Optical Devices.

With corporate headquarters in Morristown, New Jersey, AlliedSignal Inc. is a $14 billion advanced technology and manufacturing company with 70,500 employees at 300 facilities in 40 countries. It serves customers worldwide with advanced materials, aerospace and automotive parts, chemicals, fibers and plastics. It is among the largest 100 companies on the Fortune 500 and is one of 30 companies included in the Dow Jones Industrial Average.

This release contains forward-looking statements as defined in Section 21E of the Securities Exchange Act of 1934, including statements about future business operations, financial performance and market conditions. Such forward-looking statements involve risks and uncertainties inherent in business forecasts.

   CONTACT: AlliedSignal Electron Vision
             Ken Livesay, 619/695-9255
             [e-mail]
                     or
             Mathews & Clark Communications
             Stew Chalmers, 408/736-1120
             [e-mail]