Agilent Technologies' Semiconductor Parametric Test System Fuels Transition to 300mm Wafers; Advanced Solution Accelerates Product Ramp, Improves Wafer Process Yield.

Business Editors/High Tech Writers

PALO ALTO, Calif.--(BUSINESS WIRE)--July 10, 2000

Agilent Technologies Inc. (NYSE:A) has introduced the Agilent 4073A Parametric Test System, featuring a newly developed Source Monitor Unit (SMU) and matrix that enable accurate evaluation of ultra-low current and voltage on wafers. The 4073A provides advanced, high-performance testing capabilities to the fast-growing 300mm wafer-manufacturing community. An extension of the popular and reliable 4070 series, the 4073A is ideally suited for advanced laboratories and fabrication lines focusing on next-generation semiconductors.

Once thought incapable of testing ultra-low current and voltage, production parametric test systems have been limited by both their internal hardware and probe card performance. However, the 4073A Parametric Test System and probe card design not only precisely test ultra-low current and voltage, but also offer manufacturers critical ramp-up and process yield improvements thus enhancing overall time to market.

"Time-to-market pressures, especially those in the 300mm arena, are changing the landscape of parametric test," said John Scruggs, senior vice president and general manager of Agilent's Automated Test Group. "Consequently, we are seeing increasing demands on production equipment and parametric test."

New marketplace trends such as deep sub-micron and low-power consumption require ultra-low current (sub-100fA) and voltage (sub-uV) measurement capability for DRAM cell evaluation, Cu interconnect test, and analog device matching. Agilent, in conjunction with leading automatic wafer probe manufacturers, has developed a test system with an ultra-low noise floor, improved measurement precision and resolution, and fast low-current settling times allowing for tightened measurement guardbands. These, in turn, lower the overall cost of test.

Current users of Agilent's popular 4071A and 4072A Parametric Test Systems will be able to upgrade their systems to the new 4073A, and current test plans will run on the 4073A with no modification. With its SECS/GEM interface link to all automation, Agilent's new parametric test system completely eliminates the need for test operators to handle wafers. Moreover, compatibility with the Agilent Semiconductor Process Evaluation Core Software (SPECS) test shell allows manufacturers to save time and money, especially as they migrate from 200mm to 300mm wafer fabrication lines.

U.S. Pricing and Availability

The Agilent 4073A Parametric Test System is expected to be available July 2000 with an expected ship date of November 2000. The system price is $340,000 including installation and training.

About Agilent Technologies

Agilent Technologies Inc. (NYSE: A) is a diversified technology company, resulting from Hewlett-Packard Company's plan to strategically realign itself into two fully independent companies. With approximately 43,000 employees serving customers in more than 120 countries, Agilent Technologies is a global leader in designing and manufacturing test, measurement and monitoring instruments, systems and solutions, and semiconductor and optical components. The company serves markets that include communications, electronics, life sciences and healthcare. In fiscal year 1999, the businesses comprising Agilent, then a subsidiary of HP, had net revenue of more than $8.3 billion.

Information about Agilent Technologies can be found on the Web at www.agilent.com.

NOTE TO THE EDITOR: Sales information may be obtained by calling 1-800-452-4844. Please do NOT use the editor contact or corporate telephone numbers for sales information.

Information in this release applies specifically to products available in the United States. Product availability and specifications may vary in non-U.S. markets.

If you choose to review these items, your readers will receive the quickest response to their inquiries by mailing them to Agilent Technologies, Test and Measurement Call Center, P.O. Box 4026, Englewood, CO, 80155-4026.