Aera Corporation Introduces GS-437 Vapor Delivery System for Use in CVD, Diffusion and Etch Processes.

AUSTIN, Texas--(BUSINESS WIRE)--Feb. 22, 1999-

Self-Contained Vaporizer and Refill System Allows Safe Delivery

of Chemicals While Saving Valuable Fab Floor Space

Aera Corporation, one of the world's leading suppliers of flow control products to the semiconductor industry, has introduced its GS-437 vapor delivery system developed for use in chemical vapor deposition (CVD) and diffusion processes, as well as in etch operations. The GS-437 supplies a precise flow of chemical vapor to processes without the use of a carrier gas by controlling vapor pressure using a highly accurate mass flow controller (MFC).

The main advantage of the GS-437 is that its refill system is in the same cabinet as the vaporizer, which allows safe delivery of chemicals and uses considerably less floor space than other vapor delivery systems. The cabinet and vaporizer are heated to prevent recondensation between the vaporizer tank and the process chamber, a design that substantially reduces the risk of accidents. For this reason, the GS-437 can be used to safely vaporize a wide range of liquids and flows, including tetraethyloxiarsine (TEOA) and tetraethyloxisilane (TEOS).

"This vapor delivery system solves many issues in the semiconductor manufacturing process by creating a system that uses less fab floor space while setting new standards in safe chemical vaporization," said Larry Latham, president of Aera Corporation. "The GS-437 meets SEMI S2-93 Safety Guidelines and is CE-Marked, showing Aera's commitment to meeting customer needs and providing the safest flow control products available."

The vapor delivery system works by sending liquid from the refill tank into a vaporization tank by nitrogen pressure. The vaporization tank is then heated to change the liquid chemical into a vapor state that is controlled by a high-temperature MFC as it flows to the process reactor. The refill tank continuously refills the vaporizer as the liquid chemicals are vaporized. The accuracy of the GS-437 has been demonstrated at plus/minus 1 percent of full-scale flow with a repeatability of plus/minus 0.2 percent of full-scale flow.

Aera Corporation is the world's leading supplier of flow control products and feedback systems to the semiconductor industry. For more than 21 years, Aera Corporation has offered technically innovative products, unsurpassed reliability and a dedicated worldwide service and support network. Aera has more than 250 employees and distributes its products throughout the world. The company's U.S. headquarters are located in Austin, Texas, with sales and manufacturing facilities throughout Asia and Europe. The U.S. headquarters are at 8601 Cross Park Drive, Austin, TX 78754. The telephone number is 512/339-7100 and the fax number is 512/339-8889. Aera can also be found on the World Wide Web at www.massflow.com.