Aera Corporation's New Data Sheet Details the Multi-Gas D980 Digital Mass Flow Controller, ''The Ultimate in Flexibility''.

AUSTIN, Texas--(BUSINESS WIRE)--March 30, 1999--

Multi-Gas Capability Runs an Unlimited Number of Process Gases,

Allowing Faster Manufacturing and Reducing Inventory

Aera Corporation, one of the world's leading suppliers of digital mass flow controllers to the semiconductor industry, today announced the availability of a new data sheet illustrating the company's Multi-Gas D980 Digital Mass Flow Controller (MFC) and the Aera Minimum Spares System (AMSS). The D980 is available in eight different sizes to cover all gases and flows from 10 standard cubic centimeters per minute (sccm) to 30 standard cubic liters per minute (slm), which means that only eight multi-gas digital mass flow controllers are needed to replace hundreds of spare MFCs and part numbers.

With its unlimited configuration and its ability to greatly reduce the need for spare MFCs, the D980 has many advantages for users. The unit is easily field-programmable to run any gas for any range within the MFC's mechanical limits. The D980 is a standard Aera digital MFC with additional gas selection capability programmed and calibrated into its onboard memory. The accuracy of the Multi-Gas Digital MFC is the same as a single gas digital MFC, with +/-1% of setpoint from 25-100% of full-scale, and +/-.25% from 2-25% of full-scale.

"The versatility and ease of operation that this product brings to a fab is tremendous given the critical role that MFCs hold in semiconductor manufacturing," said Larry Latham, president of Aera Corporation. "Aera has addressed the needs of its customers and is now giving them a product, and the software to support it, that improves the feasibility of their processes."

Aera provides free Windows software so that users can quickly and easily set up the MFC from any laptop or PC. The multi-gas digital MFC is also the critical component of the Aera minimum spares system (AMSS), which considerably reduces fab inventory due to its ability to be used with a variety of gases. With AMSS, the cost burden on fabs of stocking spare MFCs is reduced by thousands of dollars.

For a complementary copy of the new data sheet please contact Aera at 512/339-7100.

Aera Corporation is the world's leading supplier of flow control products and feedback systems to the semiconductor industry. For more than 21 years, Aera Corporation has offered technically innovative products, unsurpassed reliability and a dedicated worldwide service and support network. Aera has more than 250 employees and distributes its products throughout the world. The company's U.S. headquarters are located in Austin, Texas, with sales and manufacturing facilities throughout Asia and Europe. The U.S. headquarters are at 8601 Cross Park Drive, Austin, TX 78754. The telephone number is 512/339-7100 and the fax number is 512/339-8889. Aera can also be found on the World Wide Web at www.massflow.com.