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Advances in multiphysics simulation and experimental testing of MEMS.


9781860948626

Advances in multiphysics simulation and experimental testing of MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. .

Ed. by Attilio Frangi et al.

Imperial College Press

2008

489 pages

$142.00

Hardcover

Computational and experimental methods in structures; v.2

TK7875

Microelectromechanical systems See MEMS.  (MEMS) and nanoelectromechanical systems (NEMS n. 1. (Zool.) The ichneumon. ) may be ubiquitous already, but there is still plenty of room for more, and for better simulation and experimental testing procedures. These 13 extended chapters cover the newest topics in multiphysics simulation and testing, including the challenges in modeling liquid and gas flows in micro/nano devices, using kinetic equations for MEMS and NEMS, applying the direct simulation Monte Carlo Direct simulation Monte Carlo (DSMC) method uses probabilistic (Monte Carlo) simulation to solve the Boltzmann equation for fluid flows.

The DSMC method was initially proposed as a method for predicting rarefied gas flows where the Navier-Stokes equations are
 method to gas-filled MEMS devices, simulation of micro-fluidics, gas damping in MEMS using fast integral equations solvers, experimental techniques for damping characterization, nonlinear dynamics of the electrostatically actuated MEMS, couple deformation analysis of thin MEMS plates, assessment of Coulomb coulomb (k`lŏm) [for C. A. de Coulomb], abbr. coul or C, unit of electric charge. The absolute coulomb, the current U.S.  and Casimir forces, numerical simulation of bioMEMS, continuous modeling of multiphysics problems of Microsystems for topology optimization, mechanical characterization of polysilicon, and testing of nano wires and tubes. Distributed by World Scientific.

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Publication:SciTech Book News
Article Type:Book review
Date:Dec 1, 2008
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