Adept Technology Selected by Tegal's Sputtered Films Subsidiary to Provide Automated Reticle Handling for Thin-Film Deposition Tool.Business Editors/High-Tech Writers LIVERMORE, Calif.--(BUSINESS WIRE)--July 14, 2003 Thin-Film Deposition Tool to Include Adept's Reticle ret·i·cle n. A grid or pattern placed in the eyepiece of an optical instrument, used to establish scale or position. [Latin r Loading Front-End Module, Integrated Robot, Loadport, I/O (Input/Output) The transfer of data between the CPU and a peripheral device. Every transfer is an output from one device and an input to another. See PC input/output. I/O - Input/Output and Host Connectivity from Single Cell Controller Adept Technology, Inc. (OTCBB OTCBB See OTC Bulletin Board (OTCBB). :ADTK.OB), a leading manufacturer of flexible automation for the semiconductor, electronics, fiber optic, telecommunications, and life sciences industries, today announced that the Sputtered Films subsidiary of Tegal Corporation (Nasdaq:TGAL TGAL Think Globally, Act Locally Tgal Thousand gallons ), a leading semiconductor manufacturer, has selected Adept Technology to provide automated reticle handling for its thin-film deposition tool. Tegal's Sputtered Films Endeavor EUVL EUVL Extreme-Ultraviolet Lithography tool will utilize the new Adept Reticle Loading Front-End Module (RLFEM), which includes Adept robots, controls, software and clean air system technology. The Adept RLFEM(TM) platform is the only reticle handling front-end platform that incorporates the control of robot, end-effector, SMIF SMIF Standard Mechanical Interface SMIF Stream-based Model Interchange Format SMIF Shared Materials Instrumentation Facility (Duke University) SMIF Stanford Management Internship Fund SMIF SMAD4-Interacting Transcription Factor pod, I/O and host connectivity in a single cell controller and software application environment, which increases reliability, simplifies system maintainability, and lowers overall cost of ownership. "Sputtered Films is a leading provider of advanced technology, thin-film deposition semiconductor process tools and we are excited about partnering with them to develop a reticle handling platform that meets their specific requirements," said Charlie Duncheon, executive vice president of Adept Technology. "Adept Technology's innovative designs, solid record for product reliability, and excellent customer service made them an attractive choice for us," said Carole Anne Demachkie, general manager of Sputtered Films. "We look forward to the receipt of the automated handling platform they've designed to interface with our state-of-the-art Endeavor EUVL tool." The Adept RLFEM(TM) platform provides fully automated transfer of photomasks between reticle SMIF-pods and SFI's thin-film deposition process tool. It utilizes an Adept wafer and reticle handling robot, the Adept SMIF-EZ load port and a reticle flipping station. It also utilizes Adept's AIM SemiWare(TM), a patented, database-driven application development environment which interfaces with the host controller through either RS-232 or SECS/GEM protocols. The Adept RLFEM platform has a compact but flexible design and meets stringent ISO (1) See ISO speed. (2) (International Organization for Standardization, Geneva, Switzerland, www.iso.ch) An organization that sets international standards, founded in 1946. The U.S. member body is ANSI. Class 2 cleanliness standards. It features a clean, edge-contact reticle end-effector, independent reticle flip station and single cell controller for all robot, loadport, I/O and host controller connectivity. Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch and deposition systems used in the production of MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. , smart cards Example of widely used contactless smart cards are Hong Kong's Octopus card, Paris' Calypso/Navigo card and Lisbon' LisboaViva card, which predate the ISO/IEC 14443 standard. The following tables list smart cards used for public transportation and other electronic purse applications. , opto-telecom devices, integrated circuits (ICs), and other related microelectronics devices. Both etching and deposition are key process steps and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at: www.tegal.com. Adept Technology designs, manufactures and markets factory automation components and systems for the fiber optic, telecommunications, semiconductor, automotive, food and durable goods durable goods Goods, such as appliances and automobiles, that have a useful life over a number of periods. Firms that produce durable goods are often subject to wide fluctuations in sales and profits. Also called consumer durables. industries throughout the world. Adept's robots, controllers, and software products are used for small parts assembly, material handling and ultra precision process applications. Our intelligent automation product lines include industrial robots, configurable linear modules, flexible feeders, semiconductor process components, nanopositioners, machine controllers for robot mechanisms and other flexible automation equipment, machine vision, systems and software, application software, and simulation software. Founded in 1983, Adept is America's largest manufacturer of industrial robots. More information is available at www.adept.com. This press release contains certain forward-looking statements that involve a number of risks and uncertainties. Actual results could vary for a number of reasons, including, but not limited to, the potential delays associated with the development and introduction of new products or software releases; rapid technological change within the company's industry; and the potential that our new or existing products may contain defects, errors or performance problems. For a discussion of additional risk factors relating to Adept's business, see Adept's annual report on Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. for the fiscal year ended June 30, 2002, as amended, and Adept's quarterly reports on Form 10-Q Form 10-Q See 10-Q. for the quarters ended September 28, 2002, as amended, December 28, 2002, as amended, and March 29, 2003, including the discussion in Management's Discussion and Analysis Management's discussion and analysis (MD&A) A report from management to shareholders that accompanies the firm's financial statements in the annual report. It explains the period's financial results and enables management to discuss topics that may not be apparent in the financial of Financial Condition and Results of Operations contained therein. The Adept logo is a registered trademark of Adept Technology, Inc. Adept, Adept RLFEM, Adept SMIF-EZ, and Adept AIM SemiWare are trademarks of Adept Technology. All other trademarks are owned by their respective companies. |
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