Accent Debuts Scatterometry Acceleration Tool - Matchbox(TM); Advancing CD Metrology for 65nm Device Production and Beyond.BEND, Ore. -- Accent Optical Technologies (www.accentopto.com), a leading supplier of lattice engineering and photolithography A lithographic technique used to transfer the design of circuit paths onto printed circuit boards as well as the circuit paths and electronic elements of a chip onto a wafer's surface. A photomask is created with the design for each layer of the board or wafer (chip). The board or wafer is coated with a light-sensitive film (photoresist) that is hardened when exposed to light shining through the photomask. process control tools, today announced the release of Matchbox(TM), the latest component of their CDS Accelerate suite. Matchbox is a highly advanced computation engine that enhances the productivity of scatterometry-based CD and profile metrology The science of weights and measures. Metrology is an important part of semiconductor manufacturing where high-resolution tools are required to measure the tiny elements in a chip that continue to decrease year after year. systems for semiconductor equipment and manufacturing control applications. The comprehensive library approach of grating diffraction diffraction /dif·frac·tion/ (di-frak´shun) the bending or breaking up of a ray of light into its component parts. dif·frac·tion (d  -fr signature matching ensures the highest measurement precision and reliability. Today's more advanced devices require ever finer profile resolution which, in turn, places more exacting demands on the matching process. This is especially true for measurement-intensive scatterometry applications like stepper and scanner qualification for gate length uniformity. Matchbox addresses this requirement by managing and processing this function in parallel to signature acquisition by the CDS200 systems. Implementation of Matchbox methodology improves the cost of ownership and offers a rapid return on investment by increasing the metrology throughput by up to 20%, meaning an immediate "zero-footprint" capacity expansion over a fleet of tools in the fab. Additionally, Matchbox hardware and software solutions maximizes the metrology tool utilization and gives the user greater flexibility in sampling strategy, line balancing and/or using multiple libraries. Matchbox, with its scalable architecture, allows future upgradeability upgradeability - upgradability as computation demands increase and with wider adoption of more complex bi-periodic (3-D) applications. David Doyle, Product Marketing Manager for Accent said, "Leading semiconductor manufactures are seeking CD metrology solutions with one second MAM time (Move-Acquire-Measure) and computation time can be a significant portion of the MAM budget for complex multi-parameter problems. Maximizing metrology tool throughput enables greater sampling and improves the robustness of lot-to-lot or wafer-to-wafer control in high volume manufacturing." "Anticipating future product configurations and metrology requirements, our Matchbox platform permits our customers to explore even more of the data-rich diffraction space. Mining this space efficiently is essential to maximize decorrelation of measurement parameters beyond the 65nm technology node and to minimize total measurement uncertainty (TMU TMU - Table Maintenance Utility (DMLSS) TMU - Taipei Medical University TMU - Tape Memory Unit TMU - Tarbiat Modarres University TMU - Test Monitoring Unit TMU - Texture Mapping Unit (3D video rendering hardware) TMU - Time Measured Unit TMU - Time Measurement Unit TMU - Toastmasters University TMU - Tokyo Metropolitan University TMU - Total Measurement Uncertainty TMU - Traffic Management Unit (BCOPD) TMU - Traffic Management Unit (FAA))," stated Doyle. Matchbox is compatible with the PCM3 and the CDS200, Accent's library generation and metrology systems. For sales or product information, please visit our website at www.accentopto.com, call 541-322-2500 (US), +44 1904 715500 (UK) or email sales@accentopto.com. About Accent Accent Optical Technologies (www.accentopto.com) is a leading supplier of process control systems for silicon and compound semiconductor manufacturers worldwide. The company's legacy dates back over 300 years to its optical instrument manufacturing roots in York, England. Accent specializes in photolithography process control tools, providing industry-leading performance of overlay, critical dimension, and profile metrology to top-tier device manufacturers. Accent is also a major provider of lattice metrology tools, supplying process characterization and control tools to advanced semiconductor industries including those using strained silicon A technique that deposits silicon (Si) on top of silicon germanium (SiGe) for making transistors on a chip. In so doing, the silicon atoms are stretched ("strained") to line up with the silicon germanium atoms, which are wider apart. This causes less resistance in the silicon and increases performance. AmberWave Systems Corporation, Salem, NH (www.amberwave.com) is a pioneer in this technology., SOI, or advanced epitaxial layers for high performance logic, wireless communications, optoelectronics, and high brightness LEDs. |
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