Accent Announces SynRG -- Waferless Recipe Generation for Overlay Metrology Tools.BEND, Ore. -- Accent Optical Technologies (www.accentopto.com), a leading supplier of lattice engineering and photolithography A lithographic technique used to transfer the design of circuit paths onto printed circuit boards as well as the circuit paths and electronic elements of a chip onto a wafer's surface. A photomask is created with the design for each layer of the board or wafer (chip). process control tools, today announced the availability of SynRG (Synthetic Recipe Generator), a new "waferless" recipe creation application for its Caliper caliper Instrument that consists of two adjustable legs or jaws for measuring the dimensions of material parts. Spring calipers have an adjusting screw and nut; firm-joint calipers use friction at the joint to hold the legs unmoving. elan and Q240AT overlay metrology instruments. SynRG takes known design details about device layout, and processes them to create a metrology recipe automatically optimized for the product and process. By using advanced image simulation methods, SynRG is able to model real-world behavior, and produces recipes which are robust even when affected by the variations which commonly occur in semiconductor fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. processes. Waferless recipe creation has many advantages. Process flow becomes much more efficient and easier to manage: instead of waiting for the arrival of a wafer and an engineer to write a recipe, the parameters required to create the recipe can be input to SynRG in advance so that the recipe is available as soon as the wafers arrive at the metrology tool for measurement. Reduced recipe creation time represents major cost savings in equipment and manpower. Further, automating recipe creation is good for data quality, removing many uncertainties and inconsistencies from the recipe creation process. Hugh Fink fink Slang n. 1. A contemptible person. 2. An informer. 3. A hired strikebreaker. intr.v. finked, fink·ing, finks 1. To inform against another person. , Product Marketing Manager for Accent's Overlay Metrology products reports that customers who have implemented SynRG enjoy a more than 4x improvement in recipe creation efficiency. SynRG works by the direct entry of alphanumeric alphanumeric (ăl'fən  mĕr`ĭk) or alphameric (ăl'fəmĕr`ĭk), the set of letters and numbers. "design data" -- target layout and location information -- into the metrology tool or an offline workstation. It is also very straightforward to implement a system to provide this data automatically from the semiconductor fab's design database to the metrology tools. This reduces manpower requirements Human resources needed to accomplish specified work loads of organizations. even further and lessens the chances of operator errors affecting measurement results. It also allows for efficient scheduling. A further advantage emphasized by Accent is that with their successful Caliper and Q240AT overlay tools, recipes created with SynRG will run on any equivalent tool without time consuming porting or optimization and still meet class leading tool matching specifications. For sales or product information, please call 541-322-2500 (US), +44 1904 715500 (UK) or email sales@accentopto.com. About Accent Accent Optical Technologies (www.accentopto.com) is a leading supplier of process control systems for silicon and compound semiconductor manufacturers worldwide. The company's legacy dates back over 300 years to its optical instrument manufacturing roots in York, England. Accent specializes in photolithography process control tools, providing industry-leading performance of overlay, critical dimension, and profile metrology to top-tier device manufacturers. Accent is also a major provider of lattice metrology tools, supplying process characterization and control tools to advanced semiconductor industries including those using strained silicon A technique that deposits silicon (Si) on top of silicon germanium (SiGe) for making transistors on a chip. In so doing, the silicon atoms are stretched ("strained") to line up with the silicon germanium atoms, which are wider apart. , SOI (Silicon On Insulator) A chip architecture that increases transistor switching speed by reducing capacitance (build-up of electrical charges in the transistor's elements), and thus reducing the discharge time. The power requirement is also reduced in some designs. , or advanced epitaxial layers for high performance logic, wireless communications wireless communications System using radio-frequency, infrared, microwave, or other types of electromagnetic or acoustic waves in place of wires, cables, or fibre optics to transmit signals or data. , optoelectronics, and high brightness LEDs. |
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