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Accent Announces Filmz(TM) -- a Powerful FTIR Analysis Solution.


BEND, Ore. -- Accent Optical Technologies (www.accentopto.com), a leading supplier of lattice engineering and photolithography A lithographic technique used to transfer the design of circuit paths onto printed circuit boards as well as the circuit paths and electronic elements of a chip onto a wafer's surface.

A photomask is created with the design for each layer of the board or wafer (chip).
 process control tools, today expands the industry's broadest FTIR FTIR Fourier Transform Infrared (spectroscopy)
FTIR Frustrated Total Internal Reflection
FTIR Fourier Transfer Ir
 application suite with its newest product release -- Filmz(TM). It employs new proprietary intelligent algorithms to robustly extract the maximum amount of information from the measured IR spectrum. Directly integrating an interpretive in·ter·pre·tive   also in·ter·pre·ta·tive
adj.
Relating to or marked by interpretation; explanatory.



in·terpre·tive·ly adv.
 engine within the algorithms dramatically improves the ease of use to the point whereby operators can generate effective recipes.

As an example, the previous application required the recipe definition of 16 parameters that presumed a detailed technical knowledge of the material and FTIR operational variables. Filmz(TM) delivered the same results with only three general variables inputted.

In addition to improved ease of use, Filmz(TM) is more robust in its applicability. It requires no calibration and a single recipe can reliably determine thickness over several orders of magnitude with nanometer level precision. In the case of semiconductive epitaxial films, Filmz(TM) is immune to large variations in dopant dopant

Any impurity added to a semiconductor to modify its electrical conductivity. The most common semiconductors, silicon and germanium, form crystalline lattices in which each atom shares electrons with four neighbours (see bonding).
 concentration, unlike most other applications. Filmz(TM) is not just for standard epi; it currently addresses the needs of customers in the following areas:

--SOI structures

--MEMS devices (substrates and layers)

--SiC wafers and devices

--Other compound materials

--Photoresist and dielectric dielectric (dī'ĭlĕk`trĭk), material that does not conduct electricity readily, i.e., an insulator (see insulation). A good dielectric should also have other properties: It must resist breakdown under high voltages; it should not  films including some extraordinarily thick films

--Verifying reprocessed monitor wafers

By way of an example, a major manufacturer of SiC wafers recently purchased a QS2200A in part because the capabilities inherent in the Filmz(TM) application were the best at accurately characterizing their product.

Pedro Vagos, Research Scientist, stated, "Accent has engaged with leading edge customers in both the Silicon and Compound Semiconductor segments to refine FTIR for almost every imaginable application over the last several decades. Having this immense knowledge base across such a broad spectrum gives our scientists the ability to deliver novel solutions like Filmz(TM) that address not just capability needs but productivity as well."

For more information, click here or call 541-322-2506 in the US or +44 1904 715500 in the UK.

About Accent

Accent Optical Technologies (www.accentopto.com) is a leading supplier of process control systems for silicon and compound semiconductor manufacturers worldwide. The company's legacy dates back over 300 years to its optical instrument manufacturing roots in York, England. Accent specializes in photolithography process control tools, providing industry-leading performance of overlay, critical dimension, and profile metrology to top-tier device manufacturers. Accent is also a major provider of lattice metrology tools, supplying process characterization and control tools to advanced semiconductor industries including those using strained silicon A technique that deposits silicon (Si) on top of silicon germanium (SiGe) for making transistors on a chip. In so doing, the silicon atoms are stretched ("strained") to line up with the silicon germanium atoms, which are wider apart. , SOI (Silicon On Insulator) A chip architecture that increases transistor switching speed by reducing capacitance (build-up of electrical charges in the transistor's elements), and thus reducing the discharge time. The power requirement is also reduced in some designs. , or advanced epitaxial layers In chip making, a semiconductor layer that is created on top of the silicon base rather than below it. See molecular beam epitaxy.  for high performance logic, wireless communications wireless communications

System using radio-frequency, infrared, microwave, or other types of electromagnetic or acoustic waves in place of wires, cables, or fibre optics to transmit signals or data.
, optoelectronics, and high brightness LEDs.
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Publication:Business Wire
Date:Nov 7, 2005
Words:436
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