ATMI Introduces New SDS CVD Gas Delivery Products.DANBURY, Conn.--(BUSINESS WIRE)--Oct. 14, 1997-- Announces SDS 1. (company) SDS - Scientific Data Systems. 2. (tool) SDS - Schema Definition Set. Gas Source For CVD CVD Cardiovascular disease, see there At Semicon/Southwest ATMI ATMI American Textile Manufacturers Institute ATMI Association for Technology in Music Instruction ATMI Advanced Technology Materials, Inc. ATMI Application-to-Transaction Manager Interface ATMI According to My Information ATMI Atm Interface Unit , Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on :ATMI), today announced the introduction of SDS(TM) Gas Source products for semiconductor chemical vapor deposition Chemical vapor deposition (CVD) is a chemical process used to produce high-purity, high-performance solid materials. The process is often used in the semiconductor industry to produce thin films. (CVD) applications at SEMICON/Southwest, the semiconductor industry conference in Austin, Texas. These new CVD products, meeting the higher purity and flow rate demands of CVD applications, complement current ion implant SDS(TM) Gas Source products. Karl Olander, ATMI's NovaSource General Manager, said, "We expect the SDS(TM) Gas Source to be as successful in CVD applications as it is for ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. . The reasons are simple: enhanced productivity, superior tool performance, and increased safety compared with traditional high-pressure cylinders. The SDS(TM) Gas Source can be integrated inside, or next to, the process tool. This eliminates expensive remote gas cabinets and extensive double-walled piping." Technical Marketing Manager, Jim Dietz, said, "ATMI anticipates expanding demand for its SDS(TM) Gas Source products throughout most semiconductor processes. For semiconductor CVD applications not currently being served, we are evaluating the SDS(TM) Gas Source with prominent toolmakers. CVD applications present different machine integration and purity requirements." Peter Kirlin, ATMI Executive Vice President, commented, "ATMI is aggressively looking to apply the SDS(TM) Gas Source technology to additional product markets. We are enthusiastic about the SDS(TM) Gas Source's future -- it offers a new era in gas handling productivity and safety." The SDS(TM) Gas Source technology -- developed and patented by ATMI -- is an alternative to high-pressure gas cylinders. Semiconductor chip manufacturing processes use toxic gases that can be both difficult and expensive to manage. Traditionally, these gases have been stored at high pressure. ATMI's patented adsorbent adsorbent /ad·sor·bent/ (ad-sor´bent) 1. pertaining to or characterized by adsorption. 2. a substance that attracts other materials or particles to its surface by adsorption. technology -- special materials with chemical "hooks" -- binds to specific gas molecules. This reduces vapor pressure vapor pressure, pressure exerted by a vapor that is in equilibrium with its liquid. A liquid standing in a sealed beaker is actually a dynamic system: some molecules of the liquid are evaporating to form vapor and some molecules of vapor are condensing to form liquid. , effectively converting the gas into a "no pressure" material. Gas is released when pulled out by the vacuum that is typical in most semiconductor processes. The SDS(TM) Gas Source products offer semiconductor manufacturers extraordinarily safe gas supply and productivity advantages, compared with high-pressure cylinders. ATMI is a leading provider of advanced semiconductor materials Semiconductor materials are insulators at absolute zero temperature that conduct electricity in a limited way at room temperature (see also Semiconductor). The defining property of a semiconductor material is that it can be doped with impurities that alter its electronic properties and environmental equipment. It is also developing next-generation semiconductor devices based on its new materials technologies. SDS(TM) Gas Source is a trademark of Matheson Gas Products and ATMI. -0- Statements which are not historical information are forward looking and involve risks and uncertainties, including, but not limited to: changes in semiconductor industry growth or ATMI's markets; competition, problems, or delays developing and commercializing new products, and other factors discussed in ATMI's filings with the Securities and Exchange Commission. CONTACT: ATMI, Danbury Dean Hamilton, 203/794-1100 dhamilton@atmi.com http://www.atmi.com |
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