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ATMI Introduces New Gas Delivery Technology.


Business Editors

DANBURY, CT--(BUSINESS WIRE)--July 10, 2000

ATMI ATMI American Textile Manufacturers Institute
ATMI Association for Technology in Music Instruction
ATMI Advanced Technology Materials, Inc.
ATMI Application-to-Transaction Manager Interface
ATMI According to My Information
ATMI Atm Interface Unit
, Inc. (Nasdaq: ATMI), today announced that its patent on a new technology for reducing the risks associated with the storage and delivery of hazardous process materials has been allowed.

This technology has been incorporated in ATMI's VAC (Volts Alternating Current) See volt and AC. (tm) -- Vacuum Actuated Cylinder -- which extends the use of sub-atmospheric pressure and reduced super-atmospheric pressure delivery to pyrophoric py·ro·phor·ic  
adj.
1. Spontaneously igniting in air.

2. Producing sparks by friction.



[From pyrophorus, substance that ignites spontaneously : from Greek
, corrosive, and other hazardous gases used in CVD CVD Cardiovascular disease, see there  and etch To create a design in a material by digging out the material. The circuit designs on printed circuit boards and chips are etched by acid. See chip and printed circuit board.  processes in the semiconductor industry. ATMI is now sampling the product into several of these applications.

Productivity, environmental, safety, and health benefits of the technology can include...
- increased storage capacities resulting in fewer required cylinder changes for
enhanced tool uptime;

- reduced potential release rates from inadvertent misconnection of the
cylinder or accidental damage to process gas piping;


- reduced exhaust ventilation power and facility investment; - reduced gas A reduced gas is a gas with a low oxidation number (or high reduction), and is usually hydrogen-rich. Strongly reduced gases include methane, ammonia, and hydrogen sulfide.

Such gases are strongly associated with the origin of life.
 panel maintenance and corrosion damage; - more rapid implementation of new process materials;

depending upon the application.

Karl Olander, Vice-President of Product Integration, said, "ATMI's VAC technology, especially in combination with ATMI's reduced pressure In thermodynamics, the reduced pressure of a fluid is defined as its actual pressure divided by its critical pressure.

 module delivery system, represents a revolutionary approach to gas delivery with significant cost savings and ES&H and benefits for many applications. Controlled studies with silane silane
 or silicon hydride

Any of a series of inorganic compounds of silicon and hydrogen with covalent bonds and the general chemical formula SinH(2n + 2).
 have validated the reduced risk potential."

Dennis Brestovansky, Vice-President of Gas Product Operations, said, "The important benefits VAC brings to etch and CVD processes using highly corrosive and pyrophoric materials should allow us to expand the process gas market we serve with our innovative gas storage and delivery technologies."

ATMI provides specialty materials, and related equipment systems and services for the worldwide semiconductor industry. Related equipment includes delivery, treatment, monitoring, and analytical process monitoring systems. Services include material management, equipment servicing, and thin film wafer deposition.

Statements which are not historical information are forward looking, and involve risks and uncertainties, including, but not limited to: changes in semiconductor industry growth or ATMI's markets; competition, problems, or delays developing and commercializing new products; problems or delays in integrating acquired operations and businesses into ATMI; and other factors discussed in ATMI's filings with the Securities and Exchange Commission. Such risks and uncertainties could cause actual results to differ from those projected.

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Publication:Business Wire
Date:Jul 10, 2000
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