ATMI Announces Key Epitaxial Services Hires.

Business Editors

DANBURY, Conn.--(BUSINESS WIRE)--March 5, 2001

ATMI, Inc. (Nasdaq: ATMI) a supplier of materials and services to the world's leading semiconductor manufacturers, today announced several key new hires for its specialty silicon and wireless communications epitaxial services businesses.

-- James Huang joins ATMI as Vice-President of ATMI Epitaxial Services for
Asia. He is responsible for business development, marketing, and selling of A T
M I's Epitaxial Services to customers in Japan, Korea, Taiwan, China, and
Southeastern Asia.

-- Dr. Steve Rickborn steps into the role of Director of Applications
Engineering. Dr. Rickborn is working closely with ATMI customers to speed their
products to market as part of our on-going efforts to provide a comprehensive
range of specialty epitaxial services to meet all customer requirements.

-- Dr. Doug Meyer, as Director of Product Marketing, leads the effort to
further introduce customers to the world's largest independent specialty
epitaxial foundry, with forty-four single chamber and four double chamber tools
dedicated to specialty silicon epitaxial services.

-- Dr. Robert Pitts, III-V Product Manager, joins ATMI just as it is to begin
initial qualification of tools at its new III-V facility in Phoenix, Arizona.
ATMI has demonstrated unique capability in the manufacture of InGaP based HBTs
and will ultimately house 19 dedicated tools at its new III-V production site.

Phil Yin, President of ATMI Epitaxial Services, said, "We are moving rapidly on our way to becoming the world's largest independent epitaxial services provider. Our reputation for meeting tight specifications with fast cycle time, high quality, and superior yield is spreading worldwide as we expand our global efforts. We feel that there are significant epitaxial service opportunities available to us and are making the investment in people to take advantage of them, despite uncertain times in the industry."

James Huang -- Vice-President of ATMI Services Asia

Before joining ATMI, Mr. Huang held several positions within MEMC including Marketing Director for Southeast Asia; General Manager, Taiwan; and Sales Director for Southeast Asia and Taiwan. Mr. Huang is fluent in Mandarin Chinese, Taiwanese, and English. He received his BS in Chemical Engineering from National Cheng Kung University, and his MS in Polymer Science from National Tsing Hua University.

Steve Rickborn, Ph.D. -- Director of Applications Engineering

Before joining ATMI, Dr. Rickborn was with Wacker Siltronic Corporation. He joined Wacker in 1988 as the Process Technology Manager; in 1994 he became Wacker's Chief Scientist. Dr. Rickborn was a core member for Wacker's "state-of-the-art" 200mm wafer fab design. He successfully developed and implemented a wide range of epi processes on varied reactor technologies. He received his BS in Chemistry from the University of California at Riverside and went on to receive his MA from San Diego State University. Dr. Rickborn holds a Ph.D. in Chemistry from the University of California at San Diego. He is the author or co-author of four articles, and holds three patents.

Doug Meyer, Ph.D. -- Director of Product Marketing

Before joining ATMI, Dr. Meyer was with ASM America. During his five years with ASM, he was an Executive Scientist and technical consultant responsible for marketing and sales. Dr. Meyer has also worked as the Director, Process Technology and Development for Watkins-Johnson; as Senior Process Scientist and Process Laboratory Manager for ASM Epitaxy; as a Member of Technical Staff for Applied Materials; as a Member of Technical Staff for Gemini Research (Tetron); and began his career as a Project Engineer for General Electric ARSD. He holds a Ph.D. in Chemical Engineering from the University of Florida and wrote his dissertation on "The Chemical Vapor Deposition of GaAs and InP." Dr. Meyer also holds an MS in Nuclear Engineering from Iowa State University and a BS in Chemical Engineering from the University of Illinois. A member of the Electrochemical Society; the Minerals, Metals and Materials Society; and the American Vacuum Society, Dr. Meyer holds one patent.

Bobby Pitts, Ph.D.-- Product Manager, III-V

Before joining ATMI, Dr. Pitts, was with Motorola for seven years where he held various Staff Engineer positions, including most recently, Senior Principal Staff Engineer -- III-V Technologies, Manager Advanced Materials. As a member of the Motorola 300mm leadership team, he was responsible for epi and metrology tool development. He received his Ph.D. in Electrical Engineering from Cornell University and his BS in Electrical Engineering from Johns Hopkins University. Dr. Pitts has co-authored 12 publications.

About Epitaxial Technology

An epitaxial film -- epi -- is a layer of single crystal semiconductor seeded from a substrate's (wafer's) crystalline structure, offering advanced features that differentiate it from the substrate wafer.

Epi allows for novel structures such as high resistivity layers over heavily doped buried layers, for dopants to be incorporated into the epi layers, and for freedom of contaminants within the epi layers.

These epi advantages make it an essential step in the fabrication of CMOS, BiCMOS, and analog and power devices. Device manufacturers are able to manipulate and tightly control the dopant concentration of device structures, which can result in a tenfold increase in yield during the manufacturing process.

ATMI Epitaxial Services is a leading ISO-9002 and QS-9000 certified supplier of specialty epitaxial services to the semiconductor industry. The Silicon Division in Mesa, Arizona provides silicon epitaxial services for thin film growth of single layers, on buried layers and patterns, and advanced bipolar, CMOS, BiCMOS, MEMS, and discrete device structures on wafers up to 200 mm. The III-V Division in Phoenix, Arizona provides GaAs, AlGaAs, InGaP, InGaAs, InAlAs, and InP epitaxial services for fiber optic, digital communication, and wireless applications.

ATMI provides specialty materials, and related equipment systems and services for the worldwide semiconductor industry. Related equipment includes delivery, treatment, monitoring, and analytical process monitoring systems. Services include material management, equipment servicing, and thin film wafer deposition.

Statements which are not historical information are forward looking, and involve risks and uncertainties, including, but not limited to: changes in semiconductor industry growth or ATMI's markets; competition, problems, or delays developing and commercializing new products; problems or delays in integrating acquired operations and businesses into ATMI; and other factors discussed in ATMI's filings with the Securities and Exchange Commission. Such risks and uncertainties could cause actual results to differ from those projected.

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