ATDF Adds In-Demand ALD Capabilities to Its Popular Tool Access Program.

AUSTIN, Texas -- ATDF, the global R&D foundry, has added much sought-after atomic-level deposition (ALD) tools from VESTA Technology to the advanced equipment inventory of its Tool Access Program (TAP) Co a service for industry chip-makers and suppliers.

TAP, launched in 2004, provides manufacturers with access to more than 100 ATDF tools covering such processes as lithography, etch, chemical-mechanical polishing, cleaning, coating and metrology. This tool availability is designed to help industry players realize more rapid product development and access to new markets.

Through a simple time-share agreement, participating suppliers can run experiments or tests on leading-edge pieces of process equipment without having to invest in a full fab infrastructure. ATDF engineers support and consult on customers' activities, on tools configured for industry-standard 200 mm and 300 mm wafers.

"TAP is proving to be the affordable option for industry suppliers who need access to a state-of-the-art fab," said Dave Anderson, ATDF general manager. "Besides the obvious benefits of pre- and post-processing capability, we also offer full protection of customers' intellectual property."

The newly qualified VESTA equipment includes an IRIS(TM) dielectric ALD cluster tool with two Nano-ALD 200/300mm chambers for high-k dielectrics and an IRIS(TM) remote-plasma annealing chamber; and two VULCAN(TM) metal ALD tools with chambers for plasma injection ALD. "We're pleased to make these advanced tools available for our customers' process and material development programs," Anderson said.

In addition to the VESTA equipment, TAP offers such in-demand tools as Novellus' interlayer dielectric (ILD) chemical-vapor deposition (CVD) tool, Vector Concept Three; Tokyo Electron's Unity II E plasma etch tool; the Omnimap RS50e resistivity measurement system from Prometrix; and the Applied Materials 300 mm Reflexion CMP and 200 mm Mirra CMP tools.

"Our tools and systems are available to any company that wants to evaluate its products on leading-edge equipment," said ATDF's Frank Tolic, who serves as direct contact for the program. Because they can rely on ATDF to staff and maintain the equipment, our customers can focus on improving their products and getting them to market." TAP customers include consumables suppliers as well as major microchip manufacturers, equipment makers and suppliers of equipment parts.

Although many customers prefer to take advantage of ATDF's information protection guarantees, others are eager to publicize their positive results: "The Tokuyama Corporation has been working with ATDF to check development performance for a 65 nm process on 300 mm wafers," said Shunkichi Omae, senior engineer for Tokuyama. "The processing is done in ATDF's real fab environment with excellent engineering. We greatly appreciate ATDF's efforts to make this project a big success."

Other TAP customers include AGC, Air Liquide, Dow, Cabot Microelectronics, CMP Solutions, Ltd., DA nanoMaterials L.L.C., Freescale, Fujimi, Global Net Corp., JSR Micro, nanoCoolers, Philtech Inc., SemiQuest, Showa Denko, Texas Instruments, Thomas West Inc., and Tokuyama.

ATDF, a wholly owned subsidiary of SEMATECH, is a leading technology R&D center where research meets manufacturing for semiconductor manufacturers, equipment and materials suppliers, and others. ATDF customers can confidentially test new designs, integration methodologies, and prototype systems while protecting their own intellectual property, and development partners can work closely with one another in a custom manufacturing environment. ATDF also develops baseline processes, accepted industry-wide, that bring new tools and materials to manufacturing faster, at lower cost. More information can be found at www.atdf.com.