ASTeX Announces Organizational Appointments.

Business/Technology Editors

WOBURN, Mass.--(BUSINESS WIRE)--March 2, 2000

Applied Science and Technology, Inc. ("ASTeX") (Nasdaq:ASTX) today announced a new organizational structure and key new hires to meet the needs of its global customer base.

ASTeX has promoted John E. Ross to senior vice president and head of the Company's Global Customer Operations ("GCO"). Mr. Ross joined ASTeX in January 2000 with broad experience in operations, sales, service, and general management at Applied Magnetics Corporation, Read-Rite Corporation, Tegal Corporation, and ITT Semiconductor. Mr. Ross replaces Dr. Avi Katz, who has resigned his position as senior vice president and head of the GCO, in order to pursue new business opportunities outside of ASTeX.

To enhance support of the Company's OEM products, ASTeX has elected Jack J. Schuss, Ph.D. as Vice President, Engineering. Dr. Schuss will be responsible for overseeing design engineering activities for semiconductor, medical, and laser products. Dr. Schuss joined the Company in February 2000 from Raytheon RF Components where he was most recently Director of Engineering. Dr. Schuss has 20 years of experience in R&D and management in the fields of RF and plasmas, and holds a Ph.D. from Princeton University and an S.B. from M.I.T.

Richard S. Post, president and chief executive officer, stated, "We are delighted to promote John Ross and have Jack Schuss join us. These additions, together with a significant number of additional new hires, bring an expanded base of knowledge and experience to the Company. We appreciate the significant contribution that Avi has made in building the GCO and our global sales and service infrastructure. We wish him well in his new endeavors."

ASTeX provides precision reactive gas processing solutions and specialty power sources to the OEM semiconductor, medical, and industrial markets, and complete process systems for advanced packaging, telecommunications, and magnetic sensor applications. ASTeX's broad product line is based on one or more of our core technologies including precision reactive gas processing, power sources, and system integration. Depending on customer needs, ASTeX provides varying levels of integration - from components to integrated subsystems to complete process solutions. For more information, visit the ASTeX web site at www.astex.com.

"Safe Harbor" statement under the Private Securities Litigation Reform Act of 1995:

This release contains forward-looking statements that are subject to risks and uncertainties, including, but not limited to, the impact of industry business cycles, competitive products and pricing, product demand and market acceptance, new product development, reliance on key strategic alliances, general economic conditions, availability of raw materials, fluctuations in operating results, and other risks detailed from time to time in our filings with the Securities and Exchange Commission.