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ASML Ships First Lithography System for Volume Production of Semiconductors with the World's Smallest Features.


VELDHOVEN, the Netherlands -- ASML Holding ASML is a Dutch company and the world’s primary supplier of lithography systems for the semiconductor industry. Of all the major chip producers worldwide, more than 80% are ASML customers.  NV (ASML ASML Abstract State Machine Language
ASML Anisotropic Shielded Microstrip Line
) today announced that it has shipped its first TWINSCAN[TM] XT:1900i, the world's only lithography lithography (lĭthŏg`rəfē), type of planographic or surface printing. It is distinguished from letterpress (relief) printing and from intaglio printing (in which the design is cut or etched into the plate).  system capable of imaging features down to 36.5 nanometers (nm) on chips manufactured in volume. Production of the XT:1900i is now ramping up fast, as multiple orders have been placed and systems will be shipped before the end of this year to many of the world's leading device makers.

These customer orders demonstrate that leading memory and logic makers are selecting the XT:1900i to help them accomplish their strategic technology goals. Chipmakers need to produce ever smaller and denser integrated circuits Integrated circuits

Miniature electronic circuits produced within and upon a single semiconductor crystal, usually silicon. Integrated circuits range in complexity from simple logic circuits and amplifiers, about 1/20 in. (1.
 to improve the functionality of their chip designs to power today's computing and consumer electronics products.

"ASML's immersion immersion /im·mer·sion/ (i-mer´zhun)
1. the plunging of a body into a liquid.

2. the use of the microscope with the object and object glass both covered with a liquid.
 technology meets the demanding requirements of the world's top IC makers, said Martin van den Brink, executive vice president marketing and technology at ASML. "The XT:1900i, the latest addition to our production-proven line of immersion tools, allows customers to extend their high-volume manufacturing capabilities to an unprecedented 36.5-nm resolution."

The implementation of immersion technology in production is making fast progress resulting in the fact that to date, more than two million wafers have been processed on ASML's TWINSCAN immersion systems in total and half of that in the last quarter.

About the TWINSCAN XT:1900i

The TWINSCAN XT:1900i with HydroLith[TM] immersion technology places liquid between the lens and the silicon wafer enabling chipmakers to produce smaller features while using a light source with the same wavelength. Immersion technology also improves the depth of focus or quality of the image to be drawn on a chip compared to dry imaging at similar resolution. The XT:1900i builds on the proven performance of the XT:1700i which is currently used in volume production. The XT:1900i offers the highest numerical aperture The measurement of the acceptance angle of an optical fiber, which is the maximum angle at which the core of the fiber will take in light that will be contained within the core. Taken from the fiber core axis (center of core), the measurement is the square root of the squared refractive  available (NA of 1.35) and has demonstrated industry-leading performance of 36.5-nm resolution, 4.6-nm single-machine overlay (1) A preprinted, precut form placed over a screen, key or tablet for identification purposes. See keyboard template.

(2) A program segment called into memory when required.
 and 131 wafers per hour productivity.

About ASML

ASML is the world's leading provider of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or chips. Headquartered in Veldhoven, the Netherlands, ASML is traded on Euronext Amsterdam and NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
 under the symbol ASML. For more information, visit the web site www.asml.com
COPYRIGHT 2007 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2007, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Jul 18, 2007
Words:388
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