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ASML SELECTS 300MM TWINSCAN AS SINGLE PLATFORM AT 193NM WAVELENGTH.


ASML Holding ASML is a Dutch company and the world’s primary supplier of lithography systems for the semiconductor industry. Of all the major chip producers worldwide, more than 80% are ASML customers.  N.V. of the Netherlands (ASML ASML Abstract State Machine Language
ASML Anisotropic Shielded Microstrip Line
) has announced that it will converge its 193nm wavelength product offering onto a single platform, the TWINSCAN AT:1100, the industry's first high-productivity, dual-stage ArF (193nm) lithography system for 300mm wafer processing with 100nm resolution.

ASML will discontinue before year-end the development and shipment of its Micrascan V product, a 193nm wavelength system acquired through the company's merger in May 2001 with the Silicon Valley Group, Inc. The company will extend TWINSCAN manufacturing competencies and certain R&D programs from the Netherlands to the Wilton, Connecticut Wilton is a town in Fairfield County, Connecticut, in the United States. As of the 2000 census, the town population was 17,633. It is one of the most affluent communities in the United States. , facility to optimize ASML's industrial base in the United States United States, officially United States of America, republic (2005 est. pop. 295,734,000), 3,539,227 sq mi (9,166,598 sq km), North America. The United States is the world's third largest country in population and the fourth largest country in area. .

Doug Dunn, ASML's President and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. , said: "Our decision was made after close consultation with customers and we expect to ship our TWINSCAN AT:1100 product in early 2002 as a result of that. It is very important for ASML to concentrate our talent and leading edge technology on one platform, the industry standard TWINSCAN."

Developed for volume production applications, the 300mm TWINSCAN AT:1100 is a 193nm wavelength system with the industry's highest numerical aperture The measurement of the acceptance angle of an optical fiber, which is the maximum angle at which the core of the fiber will take in light that will be contained within the core. Taken from the fiber core axis (center of core), the measurement is the square root of the squared refractive  ArF lens. ASML has been the leading supplier of high numerical aperture 193nm solutions to the industry since June 2001 through its 200mm PAS 5500 Step & Scan platform.

TWINSCAN features dual wafer stage technology that enables the exposure of one wafer and the alignment of the next wafer to take place in parallel, giving higher throughput and increased productivity.
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Comment:ASML SELECTS 300MM TWINSCAN AS SINGLE PLATFORM AT 193NM WAVELENGTH.
Publication:EDP Weekly's IT Monitor
Geographic Code:1USA
Date:Dec 3, 2001
Words:239
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