ASML MaskTools Licenses Scattering-Bar Technology to IBM.Business Editors/High-Tech Writers SANTA CLARA Santa Clara, city, Cuba Santa Clara (sän`tä klä`rä), city (1994 est. pop. 217,000), capital of Villa Clara prov., central Cuba. , Calif.--(BUSINESS WIRE)--July 10, 2000 ASML ASML Abstract State Machine Language ASML Anisotropic Shielded Microstrip Line MaskTools, a wholly owned subsidiary Wholly Owned Subsidiary A subsidiary whose parent company owns 100% of its common stock. Notes: In other words, the parent company owns the company outright and there are no minority owners. of ASML, today announced that International Business Machines (IBM (International Business Machines Corporation, Armonk, NY, www.ibm.com) The world's largest computer company. IBM's product lines include the S/390 mainframes (zSeries), AS/400 midrange business systems (iSeries), RS/6000 workstations and servers (pSeries), Intel-based servers (xSeries) ) (NYSE NYSE See: New York Stock Exchange :IBM) has licensed ASML MaskTools' patented scattering-bar technology for fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. of application-specific integrated circuits (ASICs) with 130nm (0.13 micron) design rules. The license allows IBM to begin using the optical extension technology to produce photomasks with advanced chip designs for both R&D and volume production. This licensing agreement marks the first business between ASML MaskTools and IBM, the world's largest information technology company. ASML MaskTools' scattering bar-technology extends optical imaging technology and significantly increases depth-of-focus at sub-wavelength regimes. This enables a wider process window and cost-effective photomasks, attributes that are especially beneficial in manufacturing ASICs. By enabling the design of sub-resolution features on a photomask, scattering-bar technology can greatly increase process yields for devices with 150nm feature sizes and below. These sub-resolution features increase the depth of focus of the imaging process in the wafer fab. Optical extension techniques, such as optical proximity correction Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The two most common applications for OPC are linewidth differences between features in regions of different density (e. , phase shifting, scattering bars and off-axis illumination, are allowing semiconductor companies to extend the life of deep UV lithography well beyond the sub-wavelength barrier. "Our scattering-bar technology is the industry's most advanced and complete manufacturing solution for next-generation devices using today's optical tools," said Doug Marsh Doug Marsh (born June 18, 1958 in Akron, Ohio) is a former professional American football player who played tight end for seven seasons for the St. Louis Cardinals. , president of ASML MaskTools. "We are extremely proud that IBM, a leading global semiconductor company, has selected our technology to support its next-generation chip production capabilities." About IBM: IBM is the world's largest information technology company, with 80 years of leadership in helping businesses innovate. IBM creates, develops and manufactures the industry's most advanced information technologies, including computer systems, software, networking systems, storage devices and microelectronics. The fastest way to get more information about IBM is through the IBM home page at http://www.ibm.com. Information on IBM's partner program is available at http://www.ibm.com/partnerworld. About ASML MaskTools: ASML MaskTools, Inc. is an ASML company based in Santa Clara. The company is focused on providing an array of optical extension technologies to enhance photolithography process latitude, thereby improving IC yields in manufacturing. Optical extension technologies are becoming essential as optical lithography is continuing to be used for volume IC manufacturing below the wavelength of the exposure light source. For more information on MaskTools' products and services, call the company at 408/855-0500 or visit its website at www.masktools.com. About ASML: ASML, founded in 1984, is a world leader in advanced lithography systems that are essential to the fabrication of integrated circuits. ASML is publicly traded on both the Amsterdam Exchanges and on the Nasdaq Stock Market Nasdaq stock market The first electronic stock market listing over 5000 companies. The Nasdaq stock market comprises two separate markets, namely the Nasdaq National Market, which trades large, active securities and the Nasdaq Smallcap Market that trades emerging growth companies. (R) under the symbol "ASML." Visit the company's web site at http://www.asml.com for more information. Note to Editors: MaskTools and MaskRigger are trademarks of ASML. |
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