ASM Lithography Purchases Mono-Lith Software Packages from New Vision Systems; Software Allows for Analysis of Wafer Stepper Performance.CAMBRIDGE, Mass.--(BUSINESS WIRE)--Sept. 23, 1996--New Vision Systems, Inc., announced today that ASM (1) (Association for Systems Management) An international membership organization based in Cleveland, Ohio. Founded in 1947 and disbanded in 1996, it sponsored conferences in all phases of administrative systems and management. Lithography lithography (lĭthŏg`rəfē), type of planographic or surface printing. It is distinguished from letterpress (relief) printing and from intaglio printing (in which the design is cut or etched into the plate). has purchased multiple software licenses In computing, software that is copyrighted and licensed under a software license is done under a variety of licensing schemes. For end-users there are proprietary licenses and there are free software licenses, and there are proprietary Within these schemes are further classifications. of its MONO-LITH Analysis software and other New Vision Systems software products, valued at over $700 thousand. MONO-LITH is the industry standard for overlay (1) A preprinted, precut form placed over a screen, key or tablet for identification purposes. See keyboard template. (2) A program segment called into memory when required. registration and critical dimension metrology analysis for wafer steppers. The software will be used by ASM application engineers to analyze wafer stepper step·per n. 1. One that steps, especially in a fast or spirited manner. 2. Informal A dancer. Noun 1. performance in semiconductor manufacturers' fabs. The drive to 0.25 micron device production levels requires that semiconductor manufacturers look for improved cost of ownership through higher yields. However, smaller device design rules require tighter tolerances than ever before. Therefore, wafer stepper tuning schedules have increased to maintain production systems within required specifications. The MONO-LITH software tracks the data that engineers need to maintain a wafer stepper's level of performance. "With MONO-LITH, our engineers will now be able to help customers track the performance of their wafer steppers ensuring that the high level of performance and throughput is maintained within their process tolerances and design rules," said Bart Katz, ASML's director of worldwide field application engineering. "MONO-LITH provides ASM application engineers and process engineers from the semiconductor manufacturers with a way to track the data needed to maintain the high level of performance expected from wafer steppers," said Joe Pellegrini, president of New Vision Systems. "We see a trend towards stepper manufacturers buying MONO-LITH software for their application and process engineers to help analyze stepper performance. It's one of the signs that the industry is shifting from disparate proprietary analysis solutions to a single recognized standard." The MONO-LITH Analysis Package is a complete system for the design, optimization and control of semiconductor manufacturers' lithographic lith·o·graph n. A print produced by lithography. tr.v. lith·o·graphed, lith·o·graph·ing, lith·o·graphs To produce by lithography. processes. MONO-LITH enables semiconductor manufacturers to quickly perform acceptance testing (programming) acceptance testing - Formal testing conducted to determine whether a system satisfies its acceptance criteria and thus whether the customer should accept the system. of steppers, match stepper grids and lithographic lenses, establish sampling strategies for both set-up and product wafers, and identify and correct assignable causes of overlay variation. Using the MONO-LITH Analysis Package results in improved process understanding, shortened process development, and enhanced technical training. MONO-LITH will also accelerate production ramp-up, increase lithography and metrology tool utilization and improve process control. In short, MONO-LITH is an easy-to-use cost-effective tool for maximizing stepper utilization. New Vision Systems, Inc., a privately-held company headquartered in Cambridge, Mass., develops and markets application software that enhances pattern fidelity in microlithographic processes. Shipley Company, creator of the MONO-LITH software, distributes this industry standard analysis package exclusively through New Vision Systems. New Vision Systems also developed and sells the LEMSYS lens matching system for i-line and deep ultraviolet An invisible band of radiation at the upper end of the visible light spectrum. With wavelengths from 10 to 400 nm, ultraviolet starts at the end of visible light and ends at the beginning of X-rays. The primary source of ultraviolet light is the sun. microlithographic stepper systems. The company has more than 300 customer installations worldwide. Products are sold directly and through OEMs. Users include semiconductor and manufacturing equipment makers such as AMD (Advanced Micro Devices, Inc., Sunnyvale, CA, www.amd.com) A major manufacturer of semiconductor devices including x86-compatible CPUs, embedded processors, flash memories, programmable logic devices and networking chips. , ASM Lithography, Bio-Rad, Canon, Hyundai, Intel, Motorola, Nikon Precision, National Semiconductor, Philips, Samsung, Sharp, Sony, Toshiba, Ultratech Stepper, and more. ASM Lithography is a world leader in photolithography A lithographic technique used to transfer the design of circuit paths onto printed circuit boards as well as the circuit paths and electronic elements of a chip onto a wafer's surface. A photomask is created with the design for each layer of the board or wafer (chip). with an installed base of more than 600 systems at customer sites around the world. The company is headquartered in Veldhoven, The Netherlands, with U.S. headquarters in Tempe, Ariz. -0- Note to Editors: MONO-LITH is a registered trademark of Shipley Company. LEMSYS is a trademark of New Vision Systems, Inc. All other trademarks are the property of their respective holders. CONTACT: New Vision Systems Joseph Pellegrini, 617/494-6000 x6954 or Martell Communications Colleen col·leen n. An Irish girl. [Irish Gaelic cailín, diminutive of caile, girl, from Old Irish. Martell, 408/252-2913 |
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